A multiple sensor platform with dedicated CMOS-LSIs for robot applications

Chenzhong Shao, Takahiro Nakayama, Yoshiyuki Hata, Travis Bartley, Yutaka Nonomura, Shuji Tanaka, Masanori Muroyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In recent years, there has been an increasing interest in robots' tactile sense, which enables safer, more reliable and accurate human-robot communication for the future society. So far, we have developed a capacitive type tactile sensor network system for implementing a large number of sensors with MEMS-CMOS integration technologies [1-3, 9]. Considering practical use for the robot, multiple kind sensors in addition to numerous sensor distributions are necessary in terms of accurate object recognition and wide coverage of sensor requirements such as high-sensitivity, large dynamic range, high-reliability and low-cost. Thus, we proposed a sensor platform with dedicated CMOS-LSIs [6], which can utilize three types of sensors: on-chip temperature, off-chip capacitive and resistive tactile sensors. The CMOS-LSI is well designed for integration with MEMS. This paper describes the first implementation results of the multiple kind sensors with the CMOS-LSIs. We successfully constructed the multi sensor system, which has the temperature sensor, capacitive and resistive type force sensors.

Original languageEnglish
Title of host publication2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages245-250
Number of pages6
ISBN (Electronic)9781509019472
DOIs
Publication statusPublished - 2016 Nov 28
Event11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 - Sendai, Japan
Duration: 2016 Apr 172016 Apr 20

Publication series

Name2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016

Other

Other11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
CountryJapan
CitySendai
Period16/4/1716/4/20

Keywords

  • CMOS-LSI
  • Robot Application
  • multiple sensors
  • sensor platform
  • tactile sensor network system

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

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