A multilayer grating with a novel layer structure for a flat-field spectrograph attached to transmission electron microscopes in energy region of 2-4 keV

T. Imazono, M. Koike, M. Koeda, T. Nagano, H. Sasai, Y. Oue, Z. Yonezawa, S. Kuramoto, Masami Terauchi, H. Takahashi, N. Handa, T. Murano

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    4 Citations (Scopus)

    Abstract

    A multilayer mirror with a novel layer structure to uniformly enhance the reflectivity in a few keV energy range at a fixed angle of incidence is invented and applied to a multilayer grating for use in a flat-field spectrograph attached to a conventional electron microscope. The diffraction efficiency of the fabricated multilayer grating having the new layer structure is evaluated at the angle of incidence of 88.65° in the energy region of 2.1-4.0 keV. It is shown that the multilayer grating is effective to uniformly enhance the diffraction efficiency and able to be practically used in this energy region.

    Original languageEnglish
    Title of host publicationX-Ray Optics and Microanalysis - Proceedings of the 21st International Congress, ICXOM21
    Pages24-28
    Number of pages5
    DOIs
    Publication statusPublished - 2012 Jul 13
    Event21st International Congress on X-Ray Optics and Microanalysis, ICXOM21 - Campinas, Brazil
    Duration: 2011 Sep 52011 Sep 9

    Publication series

    NameAIP Conference Proceedings
    Volume1437
    ISSN (Print)0094-243X
    ISSN (Electronic)1551-7616

    Other

    Other21st International Congress on X-Ray Optics and Microanalysis, ICXOM21
    Country/TerritoryBrazil
    CityCampinas
    Period11/9/511/9/9

    Keywords

    • diffraction grating
    • multilayer
    • x-ray optics

    ASJC Scopus subject areas

    • Physics and Astronomy(all)

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