@inproceedings{de10246b609b4c65a73ba80e25778386,
title = "A multilayer grating with a novel layer structure for a flat-field spectrograph attached to transmission electron microscopes in energy region of 2-4 keV",
abstract = "A multilayer mirror with a novel layer structure to uniformly enhance the reflectivity in a few keV energy range at a fixed angle of incidence is invented and applied to a multilayer grating for use in a flat-field spectrograph attached to a conventional electron microscope. The diffraction efficiency of the fabricated multilayer grating having the new layer structure is evaluated at the angle of incidence of 88.65° in the energy region of 2.1-4.0 keV. It is shown that the multilayer grating is effective to uniformly enhance the diffraction efficiency and able to be practically used in this energy region.",
keywords = "diffraction grating, multilayer, x-ray optics",
author = "T. Imazono and M. Koike and M. Koeda and T. Nagano and H. Sasai and Y. Oue and Z. Yonezawa and S. Kuramoto and Masami Terauchi and H. Takahashi and N. Handa and T. Murano",
year = "2012",
month = jul,
day = "13",
doi = "10.1063/1.3703337",
language = "English",
isbn = "9780735410275",
series = "AIP Conference Proceedings",
pages = "24--28",
booktitle = "X-Ray Optics and Microanalysis - Proceedings of the 21st International Congress, ICXOM21",
note = "21st International Congress on X-Ray Optics and Microanalysis, ICXOM21 ; Conference date: 05-09-2011 Through 09-09-2011",
}