A multilayer grating with a novel layer structure for a flat-field spectrograph attached to transmission electron microscopes in energy region of 2-4 keV

T. Imazono, M. Koike, M. Koeda, T. Nagano, H. Sasai, Y. Oue, Z. Yonezawa, S. Kuramoto, Masami Terauchi, H. Takahashi, N. Handa, T. Murano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

A multilayer mirror with a novel layer structure to uniformly enhance the reflectivity in a few keV energy range at a fixed angle of incidence is invented and applied to a multilayer grating for use in a flat-field spectrograph attached to a conventional electron microscope. The diffraction efficiency of the fabricated multilayer grating having the new layer structure is evaluated at the angle of incidence of 88.65° in the energy region of 2.1-4.0 keV. It is shown that the multilayer grating is effective to uniformly enhance the diffraction efficiency and able to be practically used in this energy region.

Original languageEnglish
Title of host publicationX-Ray Optics and Microanalysis - Proceedings of the 21st International Congress, ICXOM21
Pages24-28
Number of pages5
DOIs
Publication statusPublished - 2012 Jul 13
Event21st International Congress on X-Ray Optics and Microanalysis, ICXOM21 - Campinas, Brazil
Duration: 2011 Sep 52011 Sep 9

Publication series

NameAIP Conference Proceedings
Volume1437
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other21st International Congress on X-Ray Optics and Microanalysis, ICXOM21
CountryBrazil
CityCampinas
Period11/9/511/9/9

Keywords

  • diffraction grating
  • multilayer
  • x-ray optics

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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