A monolithic pixel sensor with fine space-time resolution based on silicon-on-insulator technology for the ILC vertex detector

Shun Ono, Miho Yamada, Yasuo Arai, Toru Tsuboyama, Manabu Togawa, Teppei Mori, Ikuo Kurachi, Kazuhiko Hara, Yoichi Ikegami, Daisuke Sekigawa, Shun Endo, Akimasa Ishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We are developing a new monolithic pixel sensor with Silicon-on-Insulator (SOI) technology for the ILC vertex detector system. The new SOI sensor SOFIST can store both the position and timing information of charged particles. The first prototype sensor with the pixel pitch of 20 µm was evaluated at 120 GeV proton beam. The position resolution was about 1.7 µm. We are currently designing next prototype sensor chips with the pixel circuit optimized for 3D stacking technology.

Original languageEnglish
Title of host publicationProceedings of International Conference on Technology and Instrumentation in Particle Physics 2017 - Volume 2
EditorsZhen-An Liu
PublisherSpringer Science and Business Media, LLC
Pages370-374
Number of pages5
ISBN (Print)9789811313158
DOIs
Publication statusPublished - 2018 Jan 1
EventInternational Conference on Technology and Instrumentation in Particle Physics, TIPP 2017 - Beijing, China
Duration: 2017 May 222017 May 26

Publication series

NameSpringer Proceedings in Physics
Volume213
ISSN (Print)0930-8989
ISSN (Electronic)1867-4941

Other

OtherInternational Conference on Technology and Instrumentation in Particle Physics, TIPP 2017
CountryChina
CityBeijing
Period17/5/2217/5/26

Keywords

  • ILC
  • SOI pixel detector
  • Semiconductor detector

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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  • Cite this

    Ono, S., Yamada, M., Arai, Y., Tsuboyama, T., Togawa, M., Mori, T., Kurachi, I., Hara, K., Ikegami, Y., Sekigawa, D., Endo, S., & Ishikawa, A. (2018). A monolithic pixel sensor with fine space-time resolution based on silicon-on-insulator technology for the ILC vertex detector. In Z-A. Liu (Ed.), Proceedings of International Conference on Technology and Instrumentation in Particle Physics 2017 - Volume 2 (pp. 370-374). (Springer Proceedings in Physics; Vol. 213). Springer Science and Business Media, LLC. https://doi.org/10.1007/978-981-13-1316-5_69