A mixed-signal analysis for tilted MEMS torsion mirror devices

Satoshi Maruyama, Akio Higo, M. Nakada, K. Takahashi, T. Takahashi, M. Mita, Hiroyuki Fujita, Yoshiaki Nakano, Hiroshi Toshiyoshi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We have already proposed a simulation model for a 90-deg-tilted MEMS mirror, but in some reasons, numerical simulation methods for several angle counter electrode devices are not established. In order to solve these problems, we propose a cascade drive voltage signal technique and demonstrate a 51.5 deg tilted angle counter electrode and assure the effectiveness of the equivalence circuit.

    Original languageEnglish
    Title of host publication2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
    Pages109-110
    Number of pages2
    DOIs
    Publication statusPublished - 2010 Dec 1
    Event2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan
    Duration: 2010 Aug 92010 Aug 12

    Publication series

    Name2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

    Other

    Other2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
    CountryJapan
    CitySapporo
    Period10/8/910/8/12

    Keywords

    • Equivalent circuit model
    • Mixed-signal analysis
    • Simulation

    ASJC Scopus subject areas

    • Control and Systems Engineering
    • Electrical and Electronic Engineering

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