A microvalve matrix using piezoelectric actuators

T. Watanabe, H. Kuwano

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


A microvalve matrix is proposed for controlling gas flow. Mircovalves in the matrix are controlled independently and each one handles a very small gas flow. The microvalve matrix can thus control gas flows precisely in very small steps, over the range from zero flow to fully-open flow, by digitally opening and closing the appropriate number of microvalves. The microvalve proposed for this matrix has a compact and simple design for a high degree of integration. This valve is normally closed and is opened by using the deformation of the port caused by the piezoelectric effect. Calculations show that a microvalve smaller than 1×1 mm can handle a maximum gas flow rate of the order of 10-4 Pa m3/s (Air, 20°C). It is easy to reduce the flow rate. Therefore these results indicate that a microvalve matrix can achieve wide dynamic-range flow-control in small flow steps.

Original languageEnglish
Pages (from-to)107-111
Number of pages5
JournalMicrosystem Technologies
Issue number3
Publication statusPublished - 1997 May
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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