A microtranslation table with scratch-drive actuators fabricated from silicon-on-insulator wafer

Y. Kanamori, H. Yahagi, K. Hane

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

From a silicon-on-insulator (SOI) wafer, a microtranslation table with scratch-drive actuator (SDA) has been fabricated. The device Si layer of SOI wafer is etched to form the plate of SDA, which is partially connected to the handle Si substrate by the SiO 2 layer. Dicing the handle Si substrate, a microtranslation table with the SDA array has been fabricated. Placing the microtranslation table upside down on the other Si substrate on which a thin conductive film is patterned for the electrical connection, the microtranslation table is moved by the SDA without carrying a metal wire. The moving velocity of 45.5 μm/s has been obtained by applying the voltage of 120 V at the operating frequency of 500 Hz.

Original languageEnglish
Pages (from-to)451-457
Number of pages7
JournalSensors and Actuators, A: Physical
Volume125
Issue number2
DOIs
Publication statusPublished - 2006 Jan 10

Keywords

  • MEMS
  • Microtranslation table
  • Scratch-drive actuator
  • Silicon-on-insulator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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