A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels

Nguyen Van Chinh, Le Van Minh, Takahito Ono, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work, we present a micromachined fluorine-based ion source (IS) for nano-/micro-processing applications. Our proposed structure is composed of an out-of-plane Si micro-emitter surrounded by four segmented annular micro-channels. The segmented channels were implemented to control the ionic liquid (IL) flow supplied to the tip emitter, enabling to broaden the working regime and overcome the droplet emission which was observed in the conventional ionic liquid ion source (ILIS). The 1-ethyl-3-methylimidazolium tetrafluoroborate (EMIM-BF4) IL was used to produce reactive fluorine-based ions. The ILIS enabled to emit the fluorine-based ions without droplets for a wide range of voltage supply from 2.8 kV to 5 kV. The ion source was demonstrated for patterning a Si structure with the maximum etching rate of 150 μm3.μA-1.min-1.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1674-1677
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019 Jun
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 2019 Jun 232019 Jun 27

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period19/6/2319/6/27

Keywords

  • Ionic liquid
  • MEMS
  • focused ion beam
  • ionic liquid ion source
  • micro ion source

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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  • Cite this

    Chinh, N. V., Minh, L. V., Ono, T., & Kuwano, H. (2019). A Micromachined Ionic Liquid Ion Source with Flow-Controlled Segmented Annular Channels. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1674-1677). [8808471] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808471