A micro-structured Si-based electrodes for high capacity electrical double layer capacitors

Valdas Krikscikas, Hiroyuki Oguchi, Hiroshi Yanazawa, Motoaki Hara, Hiroki Kuwano

    Research output: Contribution to journalConference articlepeer-review


    We challenged to make basis for Si electrodes of electric double layer capacitors (EDLC) used as a power source of micro-sensor nodes. Mcroelectromechanical systems (MEMS) processes were successfully introduced to fabricate micro-structured Si-based electrodes to obtain high surface area which leads to high capacity of EDLCs. Study of fundamental properties revealed that the microstructured electrodes benefit from good wettability to electrolytes, but suffer from electric resistance. We found that this problem can be solved by metal-coating of the electrode surface. Finally we build an EDLC consisting of Au-coated micro-structured Si electrodes. This EDLC showed capacity of 14.3 mF/cm2, which is about 530 times larger than that of an EDLC consisting of flat Au electrodes.

    Original languageEnglish
    Article number012045
    JournalJournal of Physics: Conference Series
    Issue number1
    Publication statusPublished - 2014
    Event14th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications, PowerMEMS 2014 - Awaji Island, Hyogo, Japan
    Duration: 2014 Nov 182014 Nov 21

    ASJC Scopus subject areas

    • Physics and Astronomy(all)


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