TY - GEN
T1 - A micro-stage for linear-rotary positioning
AU - Peng, Yuxin
AU - Ito, So
AU - Shimizu, Yuki
AU - Gao, Wei
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - In this paper, a novel Z-θZ micro-stage is designed and constructed by utilizing a smooth impact friction drive. The stage is configured by two driving units, a moving element and a base. Each driving unit consists of two PZTs and a friction element. One end of each PZT is fixed on the base of the stage, and the other end is attached on a permanent magnet as the friction element. The moving element, which is a steel cylinder, is supported and moved by the friction element. Magnetic force generated by permanent magnet is utilized to stabilize the driving condition between the moving element and the friction element for friction drive. The size of the stage is less than 1 cm3. The stroke and the maximum speed of the stage in Z-direction are 3.8 mm, 5.7 mm/s, respectively. The stroke in θZ-direction is unlimited and the maximum rotational velocity is 26 rpm.
AB - In this paper, a novel Z-θZ micro-stage is designed and constructed by utilizing a smooth impact friction drive. The stage is configured by two driving units, a moving element and a base. Each driving unit consists of two PZTs and a friction element. One end of each PZT is fixed on the base of the stage, and the other end is attached on a permanent magnet as the friction element. The moving element, which is a steel cylinder, is supported and moved by the friction element. Magnetic force generated by permanent magnet is utilized to stabilize the driving condition between the moving element and the friction element for friction drive. The size of the stage is less than 1 cm3. The stroke and the maximum speed of the stage in Z-direction are 3.8 mm, 5.7 mm/s, respectively. The stroke in θZ-direction is unlimited and the maximum rotational velocity is 26 rpm.
KW - Impact friction drive
KW - Micro-stage
KW - PZT
KW - Precision positioning
KW - Rotary-linear stage
UR - http://www.scopus.com/inward/record.url?scp=84870591887&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84870591887&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.523-524.650
DO - 10.4028/www.scientific.net/KEM.523-524.650
M3 - Conference contribution
AN - SCOPUS:84870591887
SN - 9783037855096
T3 - Key Engineering Materials
SP - 650
EP - 655
BT - Emerging Technology in Precision Engineering XIV
PB - Trans Tech Publications Ltd
T2 - 14th International Conference on Precision Engineering, ICPE 2012
Y2 - 8 November 2012 through 10 November 2012
ER -