A micro-stage for linear-rotary positioning

Yuxin Peng, So Ito, Yuki Shimizu, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)


In this paper, a novel Z-θZ micro-stage is designed and constructed by utilizing a smooth impact friction drive. The stage is configured by two driving units, a moving element and a base. Each driving unit consists of two PZTs and a friction element. One end of each PZT is fixed on the base of the stage, and the other end is attached on a permanent magnet as the friction element. The moving element, which is a steel cylinder, is supported and moved by the friction element. Magnetic force generated by permanent magnet is utilized to stabilize the driving condition between the moving element and the friction element for friction drive. The size of the stage is less than 1 cm3. The stroke and the maximum speed of the stage in Z-direction are 3.8 mm, 5.7 mm/s, respectively. The stroke in θZ-direction is unlimited and the maximum rotational velocity is 26 rpm.

Original languageEnglish
Title of host publicationEmerging Technology in Precision Engineering XIV
PublisherTrans Tech Publications Ltd
Number of pages6
ISBN (Print)9783037855096
Publication statusPublished - 2012
Event14th International Conference on Precision Engineering, ICPE 2012 - Hyogo, Japan
Duration: 2012 Nov 82012 Nov 10

Publication series

NameKey Engineering Materials
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795


Other14th International Conference on Precision Engineering, ICPE 2012


  • Impact friction drive
  • Micro-stage
  • PZT
  • Precision positioning
  • Rotary-linear stage

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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