A micro-fuel processor with trench-refilled thick silicon dioxide for thermal isolation fabricated by water-immersion contact photolithography

Kuei Sung Chang, Shuji Tanaka, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

This paper presents a micro-fuel processor to produce hydrogen for micro-fuel cells. The micro-fuel processor has an original design for a heat source and a reforming chamber to improve thermal efficiency. To improve the mechanical strength as well as to maintain the effectiveness of thermal isolation, the reaction area is suspended by trench-refilled thick SiO 2. When the reaction area was heated at 200°C, the outer silicon frame was at 100°C, confirming the effectiveness of thermal isolation. To fabricate the trench-refilled thick SiO2 using a contact aligner, water-immersion contact photolithography was used and successfully demonstrated to produce fine patterns with line/space of 2 νm/1 νm (a pitch of 3 νm). The highest temperature could be controlled by tuning the equivalent ratio of H2-air mixture fed into the catalytic micro-combustor. The conversion rate of methanol to hydrogen by steam reforming was lower than 1% due to uneven temperature distribution and channeling effect.

Original languageEnglish
JournalJournal of Micromechanics and Microengineering
Volume15
Issue number9
DOIs
Publication statusPublished - 2005 Sep 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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