A micro-coordinate measurement machine (CMM) for large-scale dimensional measurement of micro-slits

So Ito, Hirotaka Kikuchi, Yuanliu Chen, Yuki Shimizu, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi

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9 Citations (Scopus)

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science