A micro-ball tapping probe for form measurement of micro-structured surface

Bin Xu, Yuki Shimizu, So Ito, I Ko

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A micro-ball tapping probe is proposed for the form measurement of the micro-structured surface with high-aspect-ratio features. The micro-ball tapping probe is composed of a micro-ball stylus, a PZT actuator and an adapter. The micro-ball stylus consists of a micro-ball with a diameter of 50 μm, and a glass tube with a cone angle of 10 degrees. The micro-ball tapping probe was employed by a contact type air-bearing displacement sensor. Series of experiments were carried out to confirm the feasibility and performance of the proposed micro-ball tapping probe, including the strength test, the frequency characteristic test, the measurement force test and the surface form measurement for a micro-structured surface. Experimental results revealed that the micro-ball tapping probe is suitable for the form measurement of the micro-structured surface with high-aspect-ratio features.

Original languageEnglish
Pages (from-to)73-80
Number of pages8
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Volume34
Issue number1
Publication statusPublished - 2013 Feb 1

Keywords

  • Air-bearing displacement sensor
  • High-aspect-ratio
  • Micro-ball stylus
  • Micro-structure
  • Micro-tapping probe

ASJC Scopus subject areas

  • Mechanical Engineering

Fingerprint Dive into the research topics of 'A micro-ball tapping probe for form measurement of micro-structured surface'. Together they form a unique fingerprint.

  • Cite this