A method for preparing atom probe specimens for nanoscale compositional analysis of metallic thin films

N. Hasegawa, K. Hono, R. Okano, H. Fujimori, T. Sakurai

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Abstract

A method for preparing atom probe field ion microscope (APFIM) specimens for nano-scale characterization of metallic thin films was developed. Magnetic thin films of Fe-Ta-C and Co-Cr were sputtered on a Cu coated glass substrate. Resist patterns with nearly the same width as the thickness of the film were printed on the film by a photolithography process. The resist coated film was, then, ion milled until the Cu buffer layer appeared. After removing the remaining resist film by acetone, the Cu underlayer was dissolved by a chronic acid solution. The fine rods were picked up on top of tungsten wires with a precision goniometer stage while observing by an optical microscope. These rods were then sharpened to FIM tips with a radius of approximately 10 nm by the pulsed micropolishing technique.

Original languageEnglish
Pages (from-to)407-412
Number of pages6
JournalApplied Surface Science
Volume67
Issue number1-4
DOIs
Publication statusPublished - 1993 Apr 2
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint

Dive into the research topics of 'A method for preparing atom probe specimens for nanoscale compositional analysis of metallic thin films'. Together they form a unique fingerprint.

Cite this