A method for preparing atom probe specimens for nanoscale compositional analysis of metallic thin films

N. Hasegawa, K. Hono, R. Okano, H. Fujimori, T. Sakurai

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    28 Citations (Scopus)

    Abstract

    A method for preparing atom probe field ion microscope (APFIM) specimens for nano-scale characterization of metallic thin films was developed. Magnetic thin films of Fe-Ta-C and Co-Cr were sputtered on a Cu coated glass substrate. Resist patterns with nearly the same width as the thickness of the film were printed on the film by a photolithography process. The resist coated film was, then, ion milled until the Cu buffer layer appeared. After removing the remaining resist film by acetone, the Cu underlayer was dissolved by a chronic acid solution. The fine rods were picked up on top of tungsten wires with a precision goniometer stage while observing by an optical microscope. These rods were then sharpened to FIM tips with a radius of approximately 10 nm by the pulsed micropolishing technique.

    Original languageEnglish
    Pages (from-to)407-412
    Number of pages6
    JournalApplied Surface Science
    Volume67
    Issue number1-4
    DOIs
    Publication statusPublished - 1993 Apr 2

    ASJC Scopus subject areas

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

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