A method for determining the spring constant of cantilevers for atomic force microscopy

Akihiro Torii, Minoru Sasaki, Kazuhiro Hane, Shigeru Okuma

Research output: Contribution to journalArticlepeer-review

246 Citations (Scopus)

Abstract

Cantilevers fabricated by means of micromachining techniques are usually used for atomic force microscopy. In this paper, the spring constant of an atomic force microscope (AFM) cantilever is determined by using a large-scale cantilever. Since the spring constant of the large-scale cantilever is calibrated accurately, the spring constant of the AFM cantilever is determined precisely by measuring the deflections of both cantilevers simultaneously using heterodyne interferometry. The slope of the force curve gives the spring constant of the AFM cantilever. It is not necessary to measure the dimensions of the AFM cantilever in the proposed method. Although this method is simple, the spring constant of the AFM cantilever is obtained accurately.

Original languageEnglish
Pages (from-to)179-184
Number of pages6
JournalMeasurement Science and Technology
Volume7
Issue number2
DOIs
Publication statusPublished - 1996 Feb

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

Fingerprint Dive into the research topics of 'A method for determining the spring constant of cantilevers for atomic force microscopy'. Together they form a unique fingerprint.

Cite this