A method for calibrating the line-focus-beam acoustic microscopy system

Jun Ichi Kushibiki; Mototaka Arakawa

doi:10.1109/58.660152

A method for calibrating the line-focus-beam acoustic microscopy system

Jun Ichi Kushibiki, Mototaka Arakawa

MEN - Biomedical Engineering

Research output: Contribution to journal › Article › peer-review

51 Citations (Scopus)

Abstract

Absolute accuracy of the line-focus-beam (LFB) acoustic microscopy system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, (e.g., the independent elastic constants and density) are measured with hig;h accuracy. Single crystal substrates of gadolinium gallium garnet (GGG) are taken as standard specimens. The LSAW propagation characteristics are measured and compared with the calculated results using the measured bulk acoustic properties. Calibration is demonstrated for the system using two LFB acoustic lens devices with a cylindrical concave surface of 1-mm radius in the frequency range 100 to 300 MHz.

Original language	English
Pages (from-to)	421-430
Number of pages	10
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	45
Issue number	2
DOIs	https://doi.org/10.1109/58.660152
Publication status	Published - 1998

ASJC Scopus subject areas

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/58.660152

Cite this

@article{366eded9564245e7b13a7144bd97d096,

title = "A method for calibrating the line-focus-beam acoustic microscopy system",

abstract = "Absolute accuracy of the line-focus-beam (LFB) acoustic microscopy system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, (e.g., the independent elastic constants and density) are measured with hig;h accuracy. Single crystal substrates of gadolinium gallium garnet (GGG) are taken as standard specimens. The LSAW propagation characteristics are measured and compared with the calculated results using the measured bulk acoustic properties. Calibration is demonstrated for the system using two LFB acoustic lens devices with a cylindrical concave surface of 1-mm radius in the frequency range 100 to 300 MHz.",

author = "Kushibiki, {Jun Ichi} and Mototaka Arakawa",

note = "Funding Information: Manuscript received April 18, 1997; accepted October 9, 1997. This work was supported in part by a Research Grant-in-Aid from the Ministry of Education, Science and Culture of Japan and by the Mitsubishi Foundation.",

year = "1998",

doi = "10.1109/58.660152",

language = "English",

volume = "45",

pages = "421--430",

journal = "Transactions of the IRE Professional Group on Ultrasonic Engineering",

issn = "0885-3010",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2",

}

TY - JOUR

T1 - A method for calibrating the line-focus-beam acoustic microscopy system

AU - Kushibiki, Jun Ichi

AU - Arakawa, Mototaka

N1 - Funding Information: Manuscript received April 18, 1997; accepted October 9, 1997. This work was supported in part by a Research Grant-in-Aid from the Ministry of Education, Science and Culture of Japan and by the Mitsubishi Foundation.

PY - 1998

Y1 - 1998

N2 - Absolute accuracy of the line-focus-beam (LFB) acoustic microscopy system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, (e.g., the independent elastic constants and density) are measured with hig;h accuracy. Single crystal substrates of gadolinium gallium garnet (GGG) are taken as standard specimens. The LSAW propagation characteristics are measured and compared with the calculated results using the measured bulk acoustic properties. Calibration is demonstrated for the system using two LFB acoustic lens devices with a cylindrical concave surface of 1-mm radius in the frequency range 100 to 300 MHz.

AB - Absolute accuracy of the line-focus-beam (LFB) acoustic microscopy system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, (e.g., the independent elastic constants and density) are measured with hig;h accuracy. Single crystal substrates of gadolinium gallium garnet (GGG) are taken as standard specimens. The LSAW propagation characteristics are measured and compared with the calculated results using the measured bulk acoustic properties. Calibration is demonstrated for the system using two LFB acoustic lens devices with a cylindrical concave surface of 1-mm radius in the frequency range 100 to 300 MHz.

UR - http://www.scopus.com/inward/record.url?scp=0032014405&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032014405&partnerID=8YFLogxK

U2 - 10.1109/58.660152

DO - 10.1109/58.660152

M3 - Article

C2 - 18244193

AN - SCOPUS:0032014405

VL - 45

SP - 421

EP - 430

JO - Transactions of the IRE Professional Group on Ultrasonic Engineering

JF - Transactions of the IRE Professional Group on Ultrasonic Engineering

SN - 0885-3010

IS - 2

ER -

A method for calibrating the line-focus-beam acoustic microscopy system

Abstract

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