A method for calibrating the line-focus-beam acoustic microscopy system

Jun Ichi Kushibiki; Mototaka Arakawa

doi:10.1109/58.660152

A method for calibrating the line-focus-beam acoustic microscopy system

Jun Ichi Kushibiki, Mototaka Arakawa

MEN - Biomedical Engineering

Research output: Contribution to journal › Article › peer-review

49 Citations (Scopus)

Abstract

Absolute accuracy of the line-focus-beam (LFB) acoustic microscopy system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, (e.g., the independent elastic constants and density) are measured with hig;h accuracy. Single crystal substrates of gadolinium gallium garnet (GGG) are taken as standard specimens. The LSAW propagation characteristics are measured and compared with the calculated results using the measured bulk acoustic properties. Calibration is demonstrated for the system using two LFB acoustic lens devices with a cylindrical concave surface of 1-mm radius in the frequency range 100 to 300 MHz.

Original language	English
Pages (from-to)	421-430
Number of pages	10
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	45
Issue number	2
DOIs	https://doi.org/10.1109/58.660152
Publication status	Published - 1998 Jan 1

ASJC Scopus subject areas

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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