A method for 3D shape reconstruction from SEM images

Kosuke Kamada, Koichiro Deguchi, Takayuki Okatani

Research output: Contribution to conferencePaperpeer-review

Abstract

In this paper, we present an extension of a method for reconstructing the shape of an object surface from its SEM image. Most of previous researches used real SEM images of an object whose shape is not known, correctness of thier results were not examined. We examined the method using a real SEM image of a known shape. We show problems which occur when the method is applied to real SEM images.

Original languageEnglish
Pages650-653
Number of pages4
Publication statusPublished - 2005 Dec 1
EventSICE Annual Conference 2005 - Okayama, Japan
Duration: 2005 Aug 82005 Aug 10

Other

OtherSICE Annual Conference 2005
CountryJapan
CityOkayama
Period05/8/805/8/10

Keywords

  • 3D reconstruction
  • Reflectance model
  • SEM image

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Computer Science Applications
  • Electrical and Electronic Engineering

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