A magnetically coupled SQUID for the digital readout of integrated HTS circuits

Mutsuo Hidaka; Sadahiko Miura; Tetsuro Satoh; Wataru Hattori; J. S. Tsai; Shuichi Tahara

doi:10.1088/0953-2048/9/4A/017

A magnetically coupled SQUID for the digital readout of integrated HTS circuits

Mutsuo Hidaka, Sadahiko Miura, Tetsuro Satoh, Wataru Hattori, J. S. Tsai, Shuichi Tahara

Research output: Contribution to journal › Article › peer-review

Abstract

A magnetically coupled SQUID (superconducting quantum interference device) for the digital readout of integrated HTS (high-temperature superconductor) circuits has been developed and a multilayer integration process for HTS circuits was evaluated. We employed ramp edge junctions in this process; the SQUID's control line was formed using the counter layer of the junctions. Three ex situ epitaxial layers were grown. Ion beam etchings were used for the base electrode and insulation layer without substrate rotation. Clear voltage modulation for the SQUID was observed up to 65 K. The critical current of the 4 μm wide control line was 1.2 mA at 65 K.

Original language	English
Pages (from-to)	A62-A65
Journal	Superconductor Science and Technology
Volume	9
Issue number	4A
DOIs	https://doi.org/10.1088/0953-2048/9/4A/017
Publication status	Published - 1996 Jan 1
Externally published	Yes

ASJC Scopus subject areas

Ceramics and Composites
Condensed Matter Physics
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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abstract = "A magnetically coupled SQUID (superconducting quantum interference device) for the digital readout of integrated HTS (high-temperature superconductor) circuits has been developed and a multilayer integration process for HTS circuits was evaluated. We employed ramp edge junctions in this process; the SQUID's control line was formed using the counter layer of the junctions. Three ex situ epitaxial layers were grown. Ion beam etchings were used for the base electrode and insulation layer without substrate rotation. Clear voltage modulation for the SQUID was observed up to 65 K. The critical current of the 4 μm wide control line was 1.2 mA at 65 K.",

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AU - Tsai, J. S.

AU - Tahara, Shuichi

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AB - A magnetically coupled SQUID (superconducting quantum interference device) for the digital readout of integrated HTS (high-temperature superconductor) circuits has been developed and a multilayer integration process for HTS circuits was evaluated. We employed ramp edge junctions in this process; the SQUID's control line was formed using the counter layer of the junctions. Three ex situ epitaxial layers were grown. Ion beam etchings were used for the base electrode and insulation layer without substrate rotation. Clear voltage modulation for the SQUID was observed up to 65 K. The critical current of the 4 μm wide control line was 1.2 mA at 65 K.

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