Abstract
A magnetically coupled SQUID (superconducting quantum interference device) for the digital readout of integrated HTS (high-temperature superconductor) circuits has been developed and a multilayer integration process for HTS circuits was evaluated. We employed ramp edge junctions in this process; the SQUID's control line was formed using the counter layer of the junctions. Three ex situ epitaxial layers were grown. Ion beam etchings were used for the base electrode and insulation layer without substrate rotation. Clear voltage modulation for the SQUID was observed up to 65 K. The critical current of the 4 μm wide control line was 1.2 mA at 65 K.
Original language | English |
---|---|
Pages (from-to) | A62-A65 |
Journal | Superconductor Science and Technology |
Volume | 9 |
Issue number | 4A |
DOIs | |
Publication status | Published - 1996 Jan 1 |
Externally published | Yes |
ASJC Scopus subject areas
- Ceramics and Composites
- Condensed Matter Physics
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry