A low-noise wide dynamic range CMOS image sensor with low and high temperatures resistance

Koichi Mizobuchi, Satoru Adachi, Jose Tejada, Hiromichi Oshikubo, Nana Akahane, Shigetoshi Sugawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

A temperature-resistant 1/3 inch SVGA (800×600 pixels) 5.6 μm pixel pitch wide-dynamic-range (WDR) CMOS image sensor has been developed using a lateral-over-flow-integration-capacitor (LOFIC) in a pixel. The sensor chips are fabricated through 0.18 μm 2P3M process with totally optimized front-end-of-line (FEOL) & back-end-of-line (BEOL) for a lower dark current. By implementing a low electrical field potential design for photodiodes, reducing damages, recovering crystal defects and terminating interface states in the FEOL+BEOL, the dark current is improved to 12 e-/pixel-sec at 60 deg.C with 50 % reduction from the previous very-low-dark-current (VLDC) FEOL and its contribution to the temporal noise is improved. Furthermore, design optimizations of the readout circuits, especially a signal-and-noise-hold circuit and a programmable-gain-amplifier (PGA) are also implemented. The measured temporal noise is 2.4 e-rms at 60 fps (:36 MHz operation). The dynamic-range (DR) is extended to 100 dB with 237 ke- full well capacity. In order to secure the temperature-resistance, the sensor chip also receives both an inorganic cap onto micro lens and a metal hermetic seal package assembly. Image samples at low & high temperatures show significant improvement in image qualities.

Original languageEnglish
Title of host publicationProceedings of SPIE-IS and T Electronic Imaging - Sensors, Cameras, and Systems for Industrial/Scientific Applications IX
DOIs
Publication statusPublished - 2008 May 19
EventSensors, Cameras, and Systems for Industrial/Scientific Applications IX - San Jose, CA, United States
Duration: 2008 Jan 292008 Jan 31

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6816
ISSN (Print)0277-786X

Other

OtherSensors, Cameras, and Systems for Industrial/Scientific Applications IX
CountryUnited States
CitySan Jose, CA
Period08/1/2908/1/31

Keywords

  • Image sensor
  • Low dark current
  • Temperature resistant
  • Wide dynamic range

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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