A linear-rotary stage for precision positioning

I Ko, Shinji Sato, Yoshikazu Arai

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)

Abstract

This paper presents a linear-rotary (Z-θZ) stage that can generate motions along and about the Z-axis based on friction drive. The moving element, which is a steel cylinder, is supported and actuated by two driving units, each consisting of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The moving ranges and maximum speeds of the stage are 12 mm, 16 mm/s in the Z-direction and 360°, 10.5 rpm in the θZ-direction, respectively. A Z-θZ sensor is also constructed for servo control of the stage.

Original languageEnglish
Pages (from-to)301-306
Number of pages6
JournalPrecision Engineering
Volume34
Issue number2
DOIs
Publication statusPublished - 2010 Apr 1

Keywords

  • Actuator
  • Linear
  • Measurement
  • Positioning
  • Rotary
  • Sensor

ASJC Scopus subject areas

  • Engineering(all)

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