A linear micro-stage with a long stroke for precision positioning of micro-objects

Yu Xin Peng, Wei Gao, Jun Kaneko, Yoshikazu Arai, Yuki Shimizu, Koichi Okamoto, Miho Chiba, Shuji Aisawa

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

In this paper, a linear micro-stage with a long stroke was presented based on the principle of impact friction drive for precision positioning of micro-objects. By employing small and strong magnets as friction elements, the influence of changes in frictional force due to wear of friction elements can be reduced, which improves the stability of the stage. A prototype stage was designed and constructed, and experiments were carried out to test the basic performance of the stage. It has been verified that, with a compact size of 20 mm × 10 mm × 3 mm, the stage can achieve a resolution of 6 nm, a maximum driving speed of 5.4 mm/s, and a total displacement of 20 mm.

Original languageEnglish
Pages (from-to)221-227
Number of pages7
JournalNami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
Volume9
Issue number3
Publication statusPublished - 2011 May 1

Keywords

  • Impact friction drive
  • Linear micro-stage
  • Long stroke
  • Magnet
  • Piezoelectric element(PZT)
  • Precision positioning

ASJC Scopus subject areas

  • Instrumentation
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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