A light-in light-out micro mirror device

Yuko Yamauchi, Akio Higo, Kuniyuki Kakushima, Hiroyuki Fujita, Hiroshi Toshiyoshi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    4 Citations (Scopus)

    Abstract

    In this paper, we report a new concept of optical MEMS (Micro Electro Mechanical System) devices that could be operated by the incident light and to operate yet another light beam; in other words, a light beam is controlled by another light beam through an optical MEMS mirror. A photodiode and an electrostatic micro mirror are integrated into an SOI (silicon-on-insulator) wafer, whose circuit diagram is equivalent to that of a photocoupler. The mechanism can be used for free-space optical computing and optically-addressed fiber optic crossconnect.

    Original languageEnglish
    Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
    Pages1175-1178
    Number of pages4
    DOIs
    Publication statusPublished - 2005
    Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
    Duration: 2005 Jun 52005 Jun 9

    Publication series

    NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
    Volume2

    Other

    Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
    CountryKorea, Republic of
    CitySeoul
    Period05/6/505/6/9

    Keywords

    • Electrostatic actuator
    • Micro mirror
    • Optical MEMS
    • Photodiode

    ASJC Scopus subject areas

    • Engineering(all)

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