A hydrogen sensor based on Mg-Pd alloy thin film

K. Yoshimura, S. Nakano, S. Uchinashi, Shinichi Yamaura, H. Kimura, A. Inoue

    Research output: Contribution to journalArticlepeer-review

    28 Citations (Scopus)


    We report on the hydrogen sensing property of Pd-capped Mg-Pd alloy thin films which were prepared by dc magnetron sputtering. Pd-capped Mg 0.9 Pd 0.1 films of thicknesses 10 nm Pd and 40 nm Mg-Pd show a good hydrogen sensing property for hydrogen-containing atmosphere at room temperature. Their sensing range is from 40 ppm to 4% hydrogen in Ar. These films are supposed to be candidates for a low-cost room temperature hydrogen sensor.

    Original languageEnglish
    Pages (from-to)3335-3338
    Number of pages4
    JournalMeasurement Science and Technology
    Issue number11
    Publication statusPublished - 2007 Nov 1


    • Hydrogen sensor
    • Magnesium alloy
    • Switchable mirror

    ASJC Scopus subject areas

    • Instrumentation
    • Engineering (miscellaneous)
    • Applied Mathematics


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