A hybrid nano-probe for precision nanofabrication of complex surfaces

W. Gao, S. Genda, Y. Kudo, S. Kiyono, J. Patten

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes an intelligent nano-probe for precision nanofabrication of complex surfaces. The probe is a hybrid of a fast controlled diamond cutting unit (FTC-unit) and a highly-sensitive piezoelectric force sensor. The FTC-unit consists of a diamond cutting tool and a PZT actuator. Complex surfaces can be generated through fast controlling the position of the tool, which corresponds to the depth of cut into the surface, by the PZT actuator. The cutting force is detected by the force sensor coupled into the FTC-unit. The information of the cutting force is employed not only for monitoring the complex fabricating process but also for obtaining the fabricated surface profile, which are important for the purpose of precision nanofabrication of complex surfaces. Two structures of coupling the force sensor to the FTC-unit are designed and compared.

Original languageEnglish
Title of host publication2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV)
Pages173-177
Number of pages5
Publication statusPublished - 2004 Dec 1
Event8th International Conference on Control, Automation, Robotics and Vision (ICARCV) - Kunming, China
Duration: 2004 Dec 62004 Dec 9

Publication series

Name2004 8th International Conference on Control, Automation, Robotics and Vision (ICARCV)
Volume1

Other

Other8th International Conference on Control, Automation, Robotics and Vision (ICARCV)
CountryChina
CityKunming
Period04/12/604/12/9

ASJC Scopus subject areas

  • Engineering(all)

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