A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network

Riyo Konno, Misato Mitsui, Hiroki Kuwano, Sumito Nagasawa, Koji Sano, Junichi Hayasaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.

Original languageEnglish
Title of host publicationThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Pages796-799
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
Duration: 2007 Oct 282007 Oct 31

Publication series

NameProceedings of IEEE Sensors

Other

Other6th IEEE Conference on SENSORS, IEEE SENSORS 2007
CountryUnited States
CityAtlanta, GA
Period07/10/2807/10/31

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Konno, R., Mitsui, M., Kuwano, H., Nagasawa, S., Sano, K., & Hayasaka, J. (2007). A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network. In The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007 (pp. 796-799). [4388520] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2007.4388520