A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit

Hidekazu Ishii; Masaaki Nagase; Nobukazu Ikeda; Yoshinobu Shiba; Yasuyuki Shirai; Rihito Kuroda; Shigetoshi Sugawa

doi:10.1109/ICSENS.2016.7808698

A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit

Hidekazu Ishii, Masaaki Nagase, Nobukazu Ikeda, Yoshinobu Shiba, Yasuyuki Shirai, Rihito Kuroda, Shigetoshi Sugawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A high sensitivity compact gas concentration sensor based on the ultraviolet (UV) light absorption spectrophotometry employing charge amplifier circuit is developed in this work as inline gas concentration monitoring system for electronic device manufacturing lines. The developed sensor was verified to be useful for concentration monitoring of metal organic (MO) gases including Bis(cyclopentadienyl)magnesium(Cp2Mg) with a high accuracy and a high reproducibility for 10ppm to 0.036% concentration range, where there was no in-line gas concentration sensor sufficiently applicable to this gas before.

Original language	English
Title of host publication	IEEE Sensors, SENSORS 2016 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781479982875
DOIs	https://doi.org/10.1109/ICSENS.2016.7808698
Publication status	Published - 2017 Jan 5
Event	15th IEEE Sensors Conference, SENSORS 2016 - Orlando, United States Duration: 2016 Oct 30 → 2016 Nov 2

Other

Other	15th IEEE Sensors Conference, SENSORS 2016
Country/Territory	United States
City	Orlando
Period	16/10/30 → 16/11/2

Keywords

charge amplifier circuit
gas concentration sensor
metal organic gas

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2016.7808698

Cite this

Ishii, H, Nagase, M, Ikeda, N, Shiba, Y, Shirai, Y , Kuroda, R & Sugawa, S 2017, A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit. in IEEE Sensors, SENSORS 2016 - Proceedings., 7808698, Institute of Electrical and Electronics Engineers Inc., 15th IEEE Sensors Conference, SENSORS 2016, Orlando, United States, 16/10/30. https://doi.org/10.1109/ICSENS.2016.7808698

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abstract = "A high sensitivity compact gas concentration sensor based on the ultraviolet (UV) light absorption spectrophotometry employing charge amplifier circuit is developed in this work as inline gas concentration monitoring system for electronic device manufacturing lines. The developed sensor was verified to be useful for concentration monitoring of metal organic (MO) gases including Bis(cyclopentadienyl)magnesium(Cp2Mg) with a high accuracy and a high reproducibility for 10ppm to 0.036% concentration range, where there was no in-line gas concentration sensor sufficiently applicable to this gas before.",

keywords = "charge amplifier circuit, gas concentration sensor, metal organic gas",

author = "Hidekazu Ishii and Masaaki Nagase and Nobukazu Ikeda and Yoshinobu Shiba and Yasuyuki Shirai and Rihito Kuroda and Shigetoshi Sugawa",

year = "2017",

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doi = "10.1109/ICSENS.2016.7808698",

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AU - Ishii, Hidekazu

AU - Nagase, Masaaki

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AU - Shirai, Yasuyuki

AU - Kuroda, Rihito

AU - Sugawa, Shigetoshi

PY - 2017/1/5

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N2 - A high sensitivity compact gas concentration sensor based on the ultraviolet (UV) light absorption spectrophotometry employing charge amplifier circuit is developed in this work as inline gas concentration monitoring system for electronic device manufacturing lines. The developed sensor was verified to be useful for concentration monitoring of metal organic (MO) gases including Bis(cyclopentadienyl)magnesium(Cp2Mg) with a high accuracy and a high reproducibility for 10ppm to 0.036% concentration range, where there was no in-line gas concentration sensor sufficiently applicable to this gas before.

AB - A high sensitivity compact gas concentration sensor based on the ultraviolet (UV) light absorption spectrophotometry employing charge amplifier circuit is developed in this work as inline gas concentration monitoring system for electronic device manufacturing lines. The developed sensor was verified to be useful for concentration monitoring of metal organic (MO) gases including Bis(cyclopentadienyl)magnesium(Cp2Mg) with a high accuracy and a high reproducibility for 10ppm to 0.036% concentration range, where there was no in-line gas concentration sensor sufficiently applicable to this gas before.

KW - charge amplifier circuit

KW - gas concentration sensor

KW - metal organic gas

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DO - 10.1109/ICSENS.2016.7808698

M3 - Conference contribution

AN - SCOPUS:85011006667

BT - IEEE Sensors, SENSORS 2016 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 15th IEEE Sensors Conference, SENSORS 2016

Y2 - 30 October 2016 through 2 November 2016

ER -

A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit

Abstract

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Keywords

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