Abstract
A high sensitivity compact gas concentration sensor based on the ultraviolet (UV) light absorption spectrophotometry employing charge amplifier circuit is developed in this work as inline gas concentration monitoring system for electronic device manufacturing lines. The developed sensor was verified to be useful for concentration monitoring of metal organic (MO) gases including Bis(cyclopentadienyl)magnesium(Cp2Mg) with a high accuracy and a high reproducibility for 10ppm to 0.036% concentration range, where there was no in-line gas concentration sensor sufficiently applicable to this gas before.
| Original language | English |
|---|---|
| Title of host publication | IEEE Sensors, SENSORS 2016 - Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9781479982875 |
| DOIs | |
| Publication status | Published - 2017 Jan 5 |
| Event | 15th IEEE Sensors Conference, SENSORS 2016 - Orlando, United States Duration: 2016 Oct 30 → 2016 Nov 2 |
Other
| Other | 15th IEEE Sensors Conference, SENSORS 2016 |
|---|---|
| Country | United States |
| City | Orlando |
| Period | 16/10/30 → 16/11/2 |
Keywords
- charge amplifier circuit
- gas concentration sensor
- metal organic gas
ASJC Scopus subject areas
- Electrical and Electronic Engineering
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Cite this
Ishii, H., Nagase, M., Ikeda, N., Shiba, Y., Shirai, Y., Kuroda, R., & Sugawa, S. (2017). A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit. In IEEE Sensors, SENSORS 2016 - Proceedings [7808698] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2016.7808698