A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit

Hidekazu Ishii, Masaaki Nagase, Nobukazu Ikeda, Yoshinobu Shiba, Yasuyuki Shirai, Rihito Kuroda, Shigetoshi Sugawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A high sensitivity compact gas concentration sensor based on the ultraviolet (UV) light absorption spectrophotometry employing charge amplifier circuit is developed in this work as inline gas concentration monitoring system for electronic device manufacturing lines. The developed sensor was verified to be useful for concentration monitoring of metal organic (MO) gases including Bis(cyclopentadienyl)magnesium(Cp2Mg) with a high accuracy and a high reproducibility for 10ppm to 0.036% concentration range, where there was no in-line gas concentration sensor sufficiently applicable to this gas before.

Original languageEnglish
Title of host publicationIEEE Sensors, SENSORS 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479982875
DOIs
Publication statusPublished - 2017 Jan 5
Event15th IEEE Sensors Conference, SENSORS 2016 - Orlando, United States
Duration: 2016 Oct 302016 Nov 2

Other

Other15th IEEE Sensors Conference, SENSORS 2016
CountryUnited States
CityOrlando
Period16/10/3016/11/2

Keywords

  • charge amplifier circuit
  • gas concentration sensor
  • metal organic gas

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Ishii, H., Nagase, M., Ikeda, N., Shiba, Y., Shirai, Y., Kuroda, R., & Sugawa, S. (2017). A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit. In IEEE Sensors, SENSORS 2016 - Proceedings [7808698] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2016.7808698