A high-sensitivity compact gas concentration sensor using ultraviolet light absorption with a heating function for a high-precision trimethyl aluminum gas supply system

Hidekazu Ishii, Masaaki Nagase, Nobukazu Ikeda, Yoshinobu Shiba, Yasuyuki Shirai, Rihito Kuroda, Shigetoshi Sugawa

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

This work presents a high-sensitivity, real-time, compact gas concentration sensor using a time-sharing dual-wavelength UV light absorption method developed for a high-precision trimethyl aluminum (TMA) gas supply system. We analyzed the characteristics of TMA, examined a method to increase sensitivity by controlling the gas transition, and fabricated a highly reliable heatable gas cell. The detection circuit demonstrated that TMA can be measured stably using a charge amplifier method that can detect various metal organic gases with high sensitivity. By controlling the sensing temperature to increase the ratio of TMA monomers (which have a higher UV absorbance) to dimers, a detection limit of 62.7 ppm was achieved.

Original languageEnglish
Article numberSBBL04
JournalJapanese journal of applied physics
Volume58
Issue numberSB
DOIs
Publication statusPublished - 2019

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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