Abstract
We discussed on relationship between the width of slit ray and the accuracy of the measurement system for surface profile of electric contact. To obtain resolution of 10 [μm], we designed the mechanism which keeps constant the focal length between the object and the lens. As a result, the width of slit ray was clear in the whole surface. A section image could measured exactly and enhanced the resolution.
| Original language | English |
|---|---|
| Pages (from-to) | 432-434 |
| Number of pages | 3 |
| Journal | IEICE Transactions on Electronics |
| Volume | E81-C |
| Issue number | 3 |
| Publication status | Published - 1998 |
Keywords
- Electric contact
- Focal length
- High-resolution
- Surface profile measurement
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering