A high-resolution measurement system for surface profile of electric contact

Yasuo Ebara, Hideaki Sone, Yoshiaki Nemoto, Tasuku Takagi

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We discussed on relationship between the width of slit ray and the accuracy of the measurement system for surface profile of electric contact. To obtain resolution of 10 [μm], we designed the mechanism which keeps constant the focal length between the object and the lens. As a result, the width of slit ray was clear in the whole surface. A section image could measured exactly and enhanced the resolution.

Original languageEnglish
Pages (from-to)432-434
Number of pages3
JournalIEICE Transactions on Electronics
VolumeE81-C
Issue number3
Publication statusPublished - 1998 Jan 1

Keywords

  • Electric contact
  • Focal length
  • High-resolution
  • Surface profile measurement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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