A glass tube micro-stylus probe for surface form metrology

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology. Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip phenomena.

Original languageEnglish
Title of host publicationSeventh International Symposium on Precision Engineering Measurements and Instrumentation
Volume8321
DOIs
Publication statusPublished - 2011 Dec 1
Event7th International Symposium on Precision Engineering Measurements and Instrumentation - Lijiang, China
Duration: 2011 Aug 72011 Aug 11

Other

Other7th International Symposium on Precision Engineering Measurements and Instrumentation
CountryChina
CityLijiang
Period11/8/711/8/11

Keywords

  • micro-probe
  • micro-stylus
  • scanning
  • shaft
  • surface form

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'A glass tube micro-stylus probe for surface form metrology'. Together they form a unique fingerprint.

  • Cite this

    Xu, B., Shimizu, Y., & Ko, I. (2011). A glass tube micro-stylus probe for surface form metrology. In Seventh International Symposium on Precision Engineering Measurements and Instrumentation (Vol. 8321). [83211Z] https://doi.org/10.1117/12.904875