Abstract
This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology. Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip phenomena.
| Original language | English |
|---|---|
| Title of host publication | Seventh International Symposium on Precision Engineering Measurements and Instrumentation |
| Volume | 8321 |
| DOIs | |
| Publication status | Published - 2011 Dec 1 |
| Event | 7th International Symposium on Precision Engineering Measurements and Instrumentation - Lijiang, China Duration: 2011 Aug 7 → 2011 Aug 11 |
Other
| Other | 7th International Symposium on Precision Engineering Measurements and Instrumentation |
|---|---|
| Country | China |
| City | Lijiang |
| Period | 11/8/7 → 11/8/11 |
Keywords
- micro-probe
- micro-stylus
- scanning
- shaft
- surface form
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Fingerprint Dive into the research topics of 'A glass tube micro-stylus probe for surface form metrology'. Together they form a unique fingerprint.
Cite this
Xu, B., Shimizu, Y., & Ko, I. (2011). A glass tube micro-stylus probe for surface form metrology. In Seventh International Symposium on Precision Engineering Measurements and Instrumentation (Vol. 8321). [83211Z] https://doi.org/10.1117/12.904875