A glass tube micro-stylus probe for surface form metrology

Bin Xu; Yuki Shimizu; I Ko

doi:10.1117/12.904875

A glass tube micro-stylus probe for surface form metrology

Bin Xu, Yuki Shimizu, I Ko

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology. Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip phenomena.

Original language	English
Title of host publication	Seventh International Symposium on Precision Engineering Measurements and Instrumentation
Volume	8321
DOIs	https://doi.org/10.1117/12.904875
Publication status	Published - 2011 Dec 1
Event	7th International Symposium on Precision Engineering Measurements and Instrumentation - Lijiang, China Duration: 2011 Aug 7 → 2011 Aug 11

Other

Other	7th International Symposium on Precision Engineering Measurements and Instrumentation
Country	China
City	Lijiang
Period	11/8/7 → 11/8/11

Keywords

micro-probe
micro-stylus
scanning
shaft
surface form

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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title = "A glass tube micro-stylus probe for surface form metrology",

abstract = "This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology. Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip phenomena.",

keywords = "micro-probe, micro-stylus, scanning, shaft, surface form",

author = "Bin Xu and Yuki Shimizu and I Ko",

year = "2011",

month = dec,

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doi = "10.1117/12.904875",

language = "English",

isbn = "9780819479402",

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note = "7th International Symposium on Precision Engineering Measurements and Instrumentation ; Conference date: 07-08-2011 Through 11-08-2011",

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TY - GEN

T1 - A glass tube micro-stylus probe for surface form metrology

AU - Xu, Bin

AU - Shimizu, Yuki

AU - Ko, I

PY - 2011/12/1

Y1 - 2011/12/1

N2 - This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology. Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip phenomena.

AB - This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology. Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip phenomena.

KW - micro-probe

KW - micro-stylus

KW - scanning

KW - shaft

KW - surface form

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DO - 10.1117/12.904875

M3 - Conference contribution

AN - SCOPUS:84855306701

SN - 9780819479402

VL - 8321

BT - Seventh International Symposium on Precision Engineering Measurements and Instrumentation

T2 - 7th International Symposium on Precision Engineering Measurements and Instrumentation

Y2 - 7 August 2011 through 11 August 2011

ER -

A glass tube micro-stylus probe for surface form metrology

Abstract

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Keywords

ASJC Scopus subject areas

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