A dual-mode surface encoder for position measurement

Wei Gao; Shuichi Dejima; Satoshi Kiyono

doi:10.1016/j.sna.2004.06.004

A dual-mode surface encoder for position measurement

Wei Gao, Shuichi Dejima, Satoshi Kiyono

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

45 Citations (Scopus)

Abstract

A surface encoder incorporating an angle grid and two two-dimensional (2D) slope sensors is presented. The angle grid is a plate inscribed with periodic sinusoidal waves in the X and Y directions as a position reference, and the position of the plate is detected uniquely using two slope-sensor units. One of the slope sensors is fitted with a beam scanning function to probe and read the angle grid. The system provides two measurement modes: a high-speed measurement mode that measures the XYθ_z position at a fast sampling rate, and a multiple degree-of-freedom (DOF) measurement mode that measures the XYθ_xθ_yθ_z position at a lower sampling rate by probe scanning. The linearity, cross-talk and resolution of a prototype encoder system are evaluated, and the system is shown to be acceptable for application as a precise dual-mode measurement scheme for a planar stage.

Original language	English
Pages (from-to)	95-102
Number of pages	8
Journal	Sensors and Actuators, A: Physical
Volume	117
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2004.06.004
Publication status	Published - 2005 Jan 3

Keywords

Multi-DOF
Position measurement
Surface encoder

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2004.06.004

Cite this

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title = "A dual-mode surface encoder for position measurement",

abstract = "A surface encoder incorporating an angle grid and two two-dimensional (2D) slope sensors is presented. The angle grid is a plate inscribed with periodic sinusoidal waves in the X and Y directions as a position reference, and the position of the plate is detected uniquely using two slope-sensor units. One of the slope sensors is fitted with a beam scanning function to probe and read the angle grid. The system provides two measurement modes: a high-speed measurement mode that measures the XYθz position at a fast sampling rate, and a multiple degree-of-freedom (DOF) measurement mode that measures the XYθxθyθz position at a lower sampling rate by probe scanning. The linearity, cross-talk and resolution of a prototype encoder system are evaluated, and the system is shown to be acceptable for application as a precise dual-mode measurement scheme for a planar stage.",

keywords = "Multi-DOF, Position measurement, Surface encoder",

author = "Wei Gao and Shuichi Dejima and Satoshi Kiyono",

note = "Funding Information: This work was financially supported by a Grant-in-Aid from the Japan Society for the Promotion of Science and the Ministry of Education, Culture, Sports, Science and Technology of Japan. ",

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doi = "10.1016/j.sna.2004.06.004",

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T1 - A dual-mode surface encoder for position measurement

AU - Gao, Wei

AU - Dejima, Shuichi

AU - Kiyono, Satoshi

N1 - Funding Information: This work was financially supported by a Grant-in-Aid from the Japan Society for the Promotion of Science and the Ministry of Education, Culture, Sports, Science and Technology of Japan.

PY - 2005/1/3

Y1 - 2005/1/3

N2 - A surface encoder incorporating an angle grid and two two-dimensional (2D) slope sensors is presented. The angle grid is a plate inscribed with periodic sinusoidal waves in the X and Y directions as a position reference, and the position of the plate is detected uniquely using two slope-sensor units. One of the slope sensors is fitted with a beam scanning function to probe and read the angle grid. The system provides two measurement modes: a high-speed measurement mode that measures the XYθz position at a fast sampling rate, and a multiple degree-of-freedom (DOF) measurement mode that measures the XYθxθyθz position at a lower sampling rate by probe scanning. The linearity, cross-talk and resolution of a prototype encoder system are evaluated, and the system is shown to be acceptable for application as a precise dual-mode measurement scheme for a planar stage.

AB - A surface encoder incorporating an angle grid and two two-dimensional (2D) slope sensors is presented. The angle grid is a plate inscribed with periodic sinusoidal waves in the X and Y directions as a position reference, and the position of the plate is detected uniquely using two slope-sensor units. One of the slope sensors is fitted with a beam scanning function to probe and read the angle grid. The system provides two measurement modes: a high-speed measurement mode that measures the XYθz position at a fast sampling rate, and a multiple degree-of-freedom (DOF) measurement mode that measures the XYθxθyθz position at a lower sampling rate by probe scanning. The linearity, cross-talk and resolution of a prototype encoder system are evaluated, and the system is shown to be acceptable for application as a precise dual-mode measurement scheme for a planar stage.

KW - Multi-DOF

KW - Position measurement

KW - Surface encoder

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A dual-mode surface encoder for position measurement

Abstract

Keywords

ASJC Scopus subject areas

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