Abstract
A surface encoder incorporating an angle grid and two two-dimensional (2D) slope sensors is presented. The angle grid is a plate inscribed with periodic sinusoidal waves in the X and Y directions as a position reference, and the position of the plate is detected uniquely using two slope-sensor units. One of the slope sensors is fitted with a beam scanning function to probe and read the angle grid. The system provides two measurement modes: a high-speed measurement mode that measures the XYθz position at a fast sampling rate, and a multiple degree-of-freedom (DOF) measurement mode that measures the XYθxθyθz position at a lower sampling rate by probe scanning. The linearity, cross-talk and resolution of a prototype encoder system are evaluated, and the system is shown to be acceptable for application as a precise dual-mode measurement scheme for a planar stage.
Original language | English |
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Pages (from-to) | 95-102 |
Number of pages | 8 |
Journal | Sensors and Actuators, A: Physical |
Volume | 117 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2005 Jan 3 |
Keywords
- Multi-DOF
- Position measurement
- Surface encoder
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering