A dual-mode surface encoder for position measurement

Wei Gao, Shuichi Dejima, Satoshi Kiyono

Research output: Contribution to journal › Article › peer-review

41 Citations (Scopus)

Abstract

A surface encoder incorporating an angle grid and two two-dimensional (2D) slope sensors is presented. The angle grid is a plate inscribed with periodic sinusoidal waves in the X and Y directions as a position reference, and the position of the plate is detected uniquely using two slope-sensor units. One of the slope sensors is fitted with a beam scanning function to probe and read the angle grid. The system provides two measurement modes: a high-speed measurement mode that measures the XYθz position at a fast sampling rate, and a multiple degree-of-freedom (DOF) measurement mode that measures the XYθxθyθz position at a lower sampling rate by probe scanning. The linearity, cross-talk and resolution of a prototype encoder system are evaluated, and the system is shown to be acceptable for application as a precise dual-mode measurement scheme for a planar stage.

Original languageEnglish
Pages (from-to)95-102
Number of pages8
JournalSensors and Actuators, A: Physical
Volume117
Issue number1
DOIs
Publication statusPublished - 2005 Jan 3

Keywords

  • Multi-DOF
  • Position measurement
  • Surface encoder

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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