A double pass surface encoder for measurement of planar motion

Yoji Watanabe, Wei Gao, Satoshi Kiyono

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

This paper describes a double pass surface encoder, composed of a 2D sinusoidal grid and an optical sensor, for nanometer position measurement in the XY plane. By using a double pass optical layout, the sensitivity becomes twice as much as that of the single pass encoder. From a wave optics simulation, the grid amplitude of 70 nm is selected. The experimental result shows that the sensor has a resolution higher than 5 nm. The interpolation error is 0.6 μm in both the X- and 7-direction. The extrapolation errors in the X- and Y-direction are 0.18 μm and 0.23 μm.

Original languageEnglish
Pages (from-to)80-99
Number of pages20
JournalInternational Journal of Surface Science and Engineering
Volume1
Issue number1
DOIs
Publication statusPublished - 2007 Jan 1

Keywords

  • double pass
  • measurement
  • micro-structured surface
  • position measurement
  • sensor
  • sinusoidal grid
  • surface encoder
  • surface stage

ASJC Scopus subject areas

  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'A double pass surface encoder for measurement of planar motion'. Together they form a unique fingerprint.

Cite this