A double-focus lens interferometer for scanning force microscopy

Kazuya Goto, Minoru Sasaki, Shigeru Okuma, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

We present a laser interferometer for displacement measurement requiring high precision. Consisting of a small number of optical parts, the instrument is simple, compact, and not affected by environmental conditions. Further, with a birefringent double-focus lens, the two interfering beams share a common path and the interference signal is immune to fluctuations of the optical path length. Peak-to-peak noise in a dc to 1 kHz bandwidth is less than 0.02 Å. We applied this interferometer to scanning force microscopy and tested the performance.

Original languageEnglish
Pages (from-to)3182-3185
Number of pages4
JournalReview of Scientific Instruments
Volume66
Issue number5
DOIs
Publication statusPublished - 1995

ASJC Scopus subject areas

  • Instrumentation

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