A DLC/W-DLC multilayered structure for strain sensing applications

Takanori Takeno, Hiroyuki Miki, Toshifumi Sugawara, Yuhtaro Hoshi, Toshiyuki Takagi

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)

Abstract

The strain dependence in tungsten-containing diamond-like carbon (W-DLC) film was investigated. The W-DLC film was deposited onto Si substrate by plasma enhanced chemical vapor deposition and DC magnetron co-sputtering of tungsten metal target. The strain dependence of resistance was measured by four-point bending test under well controlled temperature condition. The observed dependence was linear one and calculated gauge factor is 6.1. The high value of the gauge factor is originated from the piezoresistive effect. In addition, double layered structure of DLC/W-DLC film was fabricated. The double layerness and interface structure were investigated by transmission electron microscope. No clear boundary between DLC and W-DLC was observed. This was because of the continuous carbon matrix from the bottom layer of W-DLC to top DLC layer.

Original languageEnglish
Pages (from-to)713-716
Number of pages4
JournalDiamond and Related Materials
Volume17
Issue number4-5
DOIs
Publication statusPublished - 2008 Apr

Keywords

  • DLC
  • Double layered film
  • Strain sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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