A disposable ozone sensor based on a grating-coupled glass waveguide coated with a tapered film of copper tetra-t-butylphthalocyanine

Zhi Mei Qi, Hao Shen Zhou, Itaru Honma, Kiminori Itoh, Hiroyuki Yanangi

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


An integrated optical sensor specifically sensitive to ozone has been developed by vacuum evaporating a tapered thin film of copper tetra-t-butylphthalocyanine (CuPct) through a mask onto a slab waveguide made by K+-Na+ ion-exchange in glass. A pair of photoresist gratings fabricated on the waveguide offer the sensor a good long-term stability in optical coupling. The evaporated dye film composed of CuPct H-aggregates has a large absorption at 633 nm and a high-index of refraction relative to that of glass substrates. Therefore, the waveguiding mode excited with a 633 nm laser beam in the CuPct film-coved waveguide is highly attenuated. The CuPct film is very stable in air but ozone exposure at room temperature can result in a rapid and irreversible decoloration of the film. In the presence of a given concentration of ozone in the ambient air about the senor, the output light intensity was detected to linearly increase with time. It has been demonstrated that the sensor containing a 15 mm long and tens-of-nanometers thick dye film can detect 33 ppb ozone in air at room temperature.

Original languageEnglish
Pages (from-to)278-283
Number of pages6
JournalSensors and Actuators, B: Chemical
Issue number1 SPEC. ISS.
Publication statusPublished - 2005 Apr 29
Externally publishedYes


  • Decoloration
  • High selectivity
  • Low detection limit
  • Ozone sensor
  • PIE waveguide
  • Tapered film of CuPc

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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