A displacement sensor based on directional resonant photodetector

B. S. Choi, Y. Kanamori, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe a micro-optical displacement encoder based on resonant photodetector with directional sensitivity for the specific incident angle. A layered silicon photodetector thinner than the incident wavelength is designed to confine the light beam for the effective encoder signal detection by guided resonant effect. Fabricated device shows the highly enhanced sensitivity at the angle illuminated from scale grating of encoder. The displacement signal with submicron resolution was achieved by the proposed resonant photodetector and simple optical configuration.

Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2357-2360
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 2007 Jun 102007 Jun 14

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/TerritoryFrance
CityLyon
Period07/6/1007/6/14

Keywords

  • Displacement sensor
  • Resonant grating
  • Thin-film photodetector

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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