A development of automated chemical-solution-deposition machine for micro actuator with multilayered PZT thick film

Yusuke Kawai, Nobuyoshi Moriwaki, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The automated chemical-solution-deposition machine, which can repeat a deposition and a crystallization of the PZT thin film, is developed for micro actuator with multilayered PZT thick film. A 2 and 4-inch wafer can be handled in the drying, sintering and crystallizing furnaces step by step using robot arm after being dispensed and spin-coated sol-gel solution. The robot arm movement, the temperature of furnaces and the processing times of every step can be adjusted using a programmable logic controller. The maximum thickness of deposited PZT film of 3.8-μm is achieved by 44-times iteration with 32-hours in one sequence. The remanent polarization of 10-μC/cm2, the coercive field of 28-kV/cm and maximum polarization of 24-μC/cm2 are obtained which shows the capability of soft piezoelectric material for the micro actuator.

Original languageEnglish
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages2247-2250
Number of pages4
DOIs
Publication statusPublished - 2010
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: 2010 Nov 12010 Nov 4

Publication series

NameProceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
CountryUnited States
CityWaikoloa, HI
Period10/11/110/11/4

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Kawai, Y., Moriwaki, N., Ono, T., & Esashi, M. (2010). A development of automated chemical-solution-deposition machine for micro actuator with multilayered PZT thick film. In IEEE Sensors 2010 Conference, SENSORS 2010 (pp. 2247-2250). [5690701] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2010.5690701