TY - GEN
T1 - A development of automated chemical-solution-deposition machine for micro actuator with multilayered PZT thick film
AU - Kawai, Yusuke
AU - Moriwaki, Nobuyoshi
AU - Ono, Takahito
AU - Esashi, Masayoshi
PY - 2010
Y1 - 2010
N2 - The automated chemical-solution-deposition machine, which can repeat a deposition and a crystallization of the PZT thin film, is developed for micro actuator with multilayered PZT thick film. A 2 and 4-inch wafer can be handled in the drying, sintering and crystallizing furnaces step by step using robot arm after being dispensed and spin-coated sol-gel solution. The robot arm movement, the temperature of furnaces and the processing times of every step can be adjusted using a programmable logic controller. The maximum thickness of deposited PZT film of 3.8-μm is achieved by 44-times iteration with 32-hours in one sequence. The remanent polarization of 10-μC/cm2, the coercive field of 28-kV/cm and maximum polarization of 24-μC/cm2 are obtained which shows the capability of soft piezoelectric material for the micro actuator.
AB - The automated chemical-solution-deposition machine, which can repeat a deposition and a crystallization of the PZT thin film, is developed for micro actuator with multilayered PZT thick film. A 2 and 4-inch wafer can be handled in the drying, sintering and crystallizing furnaces step by step using robot arm after being dispensed and spin-coated sol-gel solution. The robot arm movement, the temperature of furnaces and the processing times of every step can be adjusted using a programmable logic controller. The maximum thickness of deposited PZT film of 3.8-μm is achieved by 44-times iteration with 32-hours in one sequence. The remanent polarization of 10-μC/cm2, the coercive field of 28-kV/cm and maximum polarization of 24-μC/cm2 are obtained which shows the capability of soft piezoelectric material for the micro actuator.
UR - http://www.scopus.com/inward/record.url?scp=79951878504&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79951878504&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2010.5690701
DO - 10.1109/ICSENS.2010.5690701
M3 - Conference contribution
AN - SCOPUS:79951878504
SN - 9781424481682
T3 - Proceedings of IEEE Sensors
SP - 2247
EP - 2250
BT - IEEE Sensors 2010 Conference, SENSORS 2010
T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010
Y2 - 1 November 2010 through 4 November 2010
ER -