A development of automated chemical-solution-deposition machine for micro actuator with multilayered PZT thick film

Yusuke Kawai; Nobuyoshi Moriwaki; Takahito Ono; Masayoshi Esashi

doi:10.1109/ICSENS.2010.5690701

A development of automated chemical-solution-deposition machine for micro actuator with multilayered PZT thick film

Yusuke Kawai, Nobuyoshi Moriwaki, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The automated chemical-solution-deposition machine, which can repeat a deposition and a crystallization of the PZT thin film, is developed for micro actuator with multilayered PZT thick film. A 2 and 4-inch wafer can be handled in the drying, sintering and crystallizing furnaces step by step using robot arm after being dispensed and spin-coated sol-gel solution. The robot arm movement, the temperature of furnaces and the processing times of every step can be adjusted using a programmable logic controller. The maximum thickness of deposited PZT film of 3.8-μm is achieved by 44-times iteration with 32-hours in one sequence. The remanent polarization of 10-μC/cm², the coercive field of 28-kV/cm and maximum polarization of 24-μC/cm² are obtained which shows the capability of soft piezoelectric material for the micro actuator.

Original language	English
Title of host publication	IEEE Sensors 2010 Conference, SENSORS 2010
Pages	2247-2250
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2010.5690701
Publication status	Published - 2010
Event	9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States Duration: 2010 Nov 1 → 2010 Nov 4

Publication series

Name	Proceedings of IEEE Sensors

Other

Other	9th IEEE Sensors Conference 2010, SENSORS 2010
Country	United States
City	Waikoloa, HI
Period	10/11/1 → 10/11/4

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2010.5690701

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A development of automated chemical-solution-deposition machine for micro actuator with multilayered PZT thick film. / Kawai, Yusuke; Moriwaki, Nobuyoshi; Ono, Takahito; Esashi, Masayoshi.

IEEE Sensors 2010 Conference, SENSORS 2010. 2010. p. 2247-2250 5690701 (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kawai, Y, Moriwaki, N, Ono, T & Esashi, M 2010, A development of automated chemical-solution-deposition machine for micro actuator with multilayered PZT thick film. in IEEE Sensors 2010 Conference, SENSORS 2010., 5690701, Proceedings of IEEE Sensors, pp. 2247-2250, 9th IEEE Sensors Conference 2010, SENSORS 2010, Waikoloa, HI, United States, 10/11/1. https://doi.org/10.1109/ICSENS.2010.5690701

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abstract = "The automated chemical-solution-deposition machine, which can repeat a deposition and a crystallization of the PZT thin film, is developed for micro actuator with multilayered PZT thick film. A 2 and 4-inch wafer can be handled in the drying, sintering and crystallizing furnaces step by step using robot arm after being dispensed and spin-coated sol-gel solution. The robot arm movement, the temperature of furnaces and the processing times of every step can be adjusted using a programmable logic controller. The maximum thickness of deposited PZT film of 3.8-μm is achieved by 44-times iteration with 32-hours in one sequence. The remanent polarization of 10-μC/cm2, the coercive field of 28-kV/cm and maximum polarization of 24-μC/cm2 are obtained which shows the capability of soft piezoelectric material for the micro actuator.",

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