A continuous single-crystal-silicon membrane deformable mirror using bimorph spring

Tong Wu, Takashi Sasaki, Masayuki Akiyama, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A DM with a 1.8mm×1.8mm mirror membrane are fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process. The stroke of the DM is 3.5μm at 115V. The influence function on the nearest neighbor is 51%. The fill factor of the DM is 99.9%.

Original languageEnglish
Title of host publicationMEMS Adaptive Optics VII
Publication statusPublished - 2013 May 29
EventMEMS Adaptive Optics VII - San Francisco, CA, United States
Duration: 2013 Feb 52013 Feb 7

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherMEMS Adaptive Optics VII
Country/TerritoryUnited States
CitySan Francisco, CA


  • Au-Si eutectic bonding
  • adaptive optics
  • bimorph spring
  • deformable mirror

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


Dive into the research topics of 'A continuous single-crystal-silicon membrane deformable mirror using bimorph spring'. Together they form a unique fingerprint.

Cite this