A comparative study of the mechanical properties of PVD coatings evaluated by new techniques and conventional methods

S. Kamiya, H. Nagasawa, K. Yamanobe, H. Hanyu, M. Saka

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Abstract

Concerning a number of different kinds of physically vapor deposited (PVD) hard coatings on different substrates, four mechanical parameters were obtained using a series of new systematic measurement techniques which have been established by the authors. They were the interface toughness, film toughness, Young's modulus of and residual strain in film. The results were quantitatively compared with the results of conventional evaluation such as the critical load obtained by scratch tests and Young's modulus by indentation tests. The reasons for the ambiguities and insensitivity of the scratch test results were able to be clearly seen through the four parameters. Possible error in Young's modulus evaluated by indentation was also quantitatively examined.

Original languageEnglish
Pages (from-to)248-253
Number of pages6
JournalThin Solid Films
Volume469-470
Issue numberSPEC. ISS.
DOIs
Publication statusPublished - 2004 Dec 22

Keywords

  • Adhesion
  • Hard coatings
  • Indentation
  • Mechanical properties
  • Scratch test
  • Strength

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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