A comparative study of the mechanical properties of PVD coatings evaluated by new techniques and conventional methods

S. Kamiya; H. Nagasawa; K. Yamanobe; H. Hanyu; M. Saka

doi:10.1016/j.tsf.2004.08.164

A comparative study of the mechanical properties of PVD coatings evaluated by new techniques and conventional methods

S. Kamiya, H. Nagasawa, K. Yamanobe, H. Hanyu, M. Saka

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

Concerning a number of different kinds of physically vapor deposited (PVD) hard coatings on different substrates, four mechanical parameters were obtained using a series of new systematic measurement techniques which have been established by the authors. They were the interface toughness, film toughness, Young's modulus of and residual strain in film. The results were quantitatively compared with the results of conventional evaluation such as the critical load obtained by scratch tests and Young's modulus by indentation tests. The reasons for the ambiguities and insensitivity of the scratch test results were able to be clearly seen through the four parameters. Possible error in Young's modulus evaluated by indentation was also quantitatively examined.

Original language	English
Pages (from-to)	248-253
Number of pages	6
Journal	Thin Solid Films
Volume	469-470
Issue number	SPEC. ISS.
DOIs	https://doi.org/10.1016/j.tsf.2004.08.164
Publication status	Published - 2004 Dec 22

Keywords

Adhesion
Hard coatings
Indentation
Mechanical properties
Scratch test
Strength

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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AU - Kamiya, S.

AU - Nagasawa, H.

AU - Yamanobe, K.

AU - Hanyu, H.

AU - Saka, M.

PY - 2004/12/22

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N2 - Concerning a number of different kinds of physically vapor deposited (PVD) hard coatings on different substrates, four mechanical parameters were obtained using a series of new systematic measurement techniques which have been established by the authors. They were the interface toughness, film toughness, Young's modulus of and residual strain in film. The results were quantitatively compared with the results of conventional evaluation such as the critical load obtained by scratch tests and Young's modulus by indentation tests. The reasons for the ambiguities and insensitivity of the scratch test results were able to be clearly seen through the four parameters. Possible error in Young's modulus evaluated by indentation was also quantitatively examined.

AB - Concerning a number of different kinds of physically vapor deposited (PVD) hard coatings on different substrates, four mechanical parameters were obtained using a series of new systematic measurement techniques which have been established by the authors. They were the interface toughness, film toughness, Young's modulus of and residual strain in film. The results were quantitatively compared with the results of conventional evaluation such as the critical load obtained by scratch tests and Young's modulus by indentation tests. The reasons for the ambiguities and insensitivity of the scratch test results were able to be clearly seen through the four parameters. Possible error in Young's modulus evaluated by indentation was also quantitatively examined.

KW - Adhesion

KW - Hard coatings

KW - Indentation

KW - Mechanical properties

KW - Scratch test

KW - Strength

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A comparative study of the mechanical properties of PVD coatings evaluated by new techniques and conventional methods

Abstract

Keywords

ASJC Scopus subject areas

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