A compact two-axis Lloyd's mirror interferometer for scale grating fabrication

Masanori Matsunaga, Kazuki Mano, Hiraku Matsukuma, Yuki Shimizu, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of a two-axis diffraction grating designed in a compact size is developed. A design study of the modified optical setup for the interferometer and the results of basic experiments with the developed optical setup are carried out to verify the possibility of fabricating the two-axis fine diffraction grating with a single exposure by the developed interferometer unit.

Original languageEnglish
Title of host publicationProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
EditorsTeen-Hang Meen
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages28-29
Number of pages2
ISBN (Electronic)9781538656099
DOIs
Publication statusPublished - 2019 Jan 16
Event2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 - Yunlin, Taiwan, Province of China
Duration: 2018 Nov 162018 Nov 18

Publication series

NameProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

Conference

Conference2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
Country/TerritoryTaiwan, Province of China
CityYunlin
Period18/11/1618/11/18

Keywords

  • Laser interference lithography
  • Lloyd's mirror interferometer
  • Photo resist

ASJC Scopus subject areas

  • Biomedical Engineering
  • Mechanics of Materials
  • Safety, Risk, Reliability and Quality
  • Management, Monitoring, Policy and Law
  • Education
  • Fluid Flow and Transfer Processes
  • Industrial and Manufacturing Engineering

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