A compact two-axis Lloyd's mirror interferometer for scale grating fabrication

Masanori Matsunaga; Kazuki Mano; Hiraku Matsukuma; Yuki Shimizu; Wei Gao

doi:10.1109/AMCON.2018.8614804

A compact two-axis Lloyd's mirror interferometer for scale grating fabrication

Masanori Matsunaga, Kazuki Mano, Hiraku Matsukuma, Yuki Shimizu, Wei Gao

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of a two-axis diffraction grating designed in a compact size is developed. A design study of the modified optical setup for the interferometer and the results of basic experiments with the developed optical setup are carried out to verify the possibility of fabricating the two-axis fine diffraction grating with a single exposure by the developed interferometer unit.

Original language	English
Title of host publication	Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
Editors	Teen-Hang Meen
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	28-29
Number of pages	2
ISBN (Electronic)	9781538656099
DOIs	https://doi.org/10.1109/AMCON.2018.8614804
Publication status	Published - 2019 Jan 16
Event	2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 - Yunlin, Taiwan, Province of China Duration: 2018 Nov 16 → 2018 Nov 18

Publication series

Name	Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

Conference

Conference	2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
Country	Taiwan, Province of China
City	Yunlin
Period	18/11/16 → 18/11/18

Keywords

Laser interference lithography
Lloyd's mirror interferometer
Photo resist

ASJC Scopus subject areas

Biomedical Engineering
Mechanics of Materials
Safety, Risk, Reliability and Quality
Management, Monitoring, Policy and Law
Education
Fluid Flow and Transfer Processes
Industrial and Manufacturing Engineering

Access to Document

10.1109/AMCON.2018.8614804

Fingerprint Dive into the research topics of 'A compact two-axis Lloyd's mirror interferometer for scale grating fabrication'. Together they form a unique fingerprint.

Cite this

Matsunaga, M., Mano, K., Matsukuma, H., Shimizu, Y., & Gao, W. (2019). A compact two-axis Lloyd's mirror interferometer for scale grating fabrication. In T-H. Meen (Ed.), Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 (pp. 28-29). [8614804] (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/AMCON.2018.8614804

A compact two-axis Lloyd's mirror interferometer for scale grating fabrication. / Matsunaga, Masanori; Mano, Kazuki; Matsukuma, Hiraku ; Shimizu, Yuki ; Gao, Wei.

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. ed. / Teen-Hang Meen. Institute of Electrical and Electronics Engineers Inc., 2019. p. 28-29 8614804 (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Matsunaga, M, Mano, K, Matsukuma, H , Shimizu, Y & Gao, W 2019, A compact two-axis Lloyd's mirror interferometer for scale grating fabrication. in T-H Meen (ed.), Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018., 8614804, Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, Institute of Electrical and Electronics Engineers Inc., pp. 28-29, 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, Yunlin, Taiwan, Province of China, 18/11/16. https://doi.org/10.1109/AMCON.2018.8614804

Matsunaga M, Mano K, Matsukuma H , Shimizu Y , Gao W. A compact two-axis Lloyd's mirror interferometer for scale grating fabrication. In Meen T-H, editor, Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. Institute of Electrical and Electronics Engineers Inc. 2019. p. 28-29. 8614804. (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018). https://doi.org/10.1109/AMCON.2018.8614804

Matsunaga, Masanori ; Mano, Kazuki ; Matsukuma, Hiraku ; Shimizu, Yuki ; Gao, Wei. / A compact two-axis Lloyd's mirror interferometer for scale grating fabrication. Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. editor / Teen-Hang Meen. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 28-29 (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018).

@inproceedings{301c1ac96b16422780203d838111e8d6,

title = "A compact two-axis Lloyd's mirror interferometer for scale grating fabrication",

abstract = "A non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of a two-axis diffraction grating designed in a compact size is developed. A design study of the modified optical setup for the interferometer and the results of basic experiments with the developed optical setup are carried out to verify the possibility of fabricating the two-axis fine diffraction grating with a single exposure by the developed interferometer unit.",

keywords = "Laser interference lithography, Lloyd's mirror interferometer, Photo resist",

author = "Masanori Matsunaga and Kazuki Mano and Hiraku Matsukuma and Yuki Shimizu and Wei Gao",

year = "2019",

month = jan,

day = "16",

doi = "10.1109/AMCON.2018.8614804",

language = "English",

series = "Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "28--29",

editor = "Teen-Hang Meen",

booktitle = "Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018",

note = "2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 ; Conference date: 16-11-2018 Through 18-11-2018",

}

TY - GEN

T1 - A compact two-axis Lloyd's mirror interferometer for scale grating fabrication

AU - Matsunaga, Masanori

AU - Mano, Kazuki

AU - Matsukuma, Hiraku

AU - Shimizu, Yuki

AU - Gao, Wei

PY - 2019/1/16

Y1 - 2019/1/16

N2 - A non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of a two-axis diffraction grating designed in a compact size is developed. A design study of the modified optical setup for the interferometer and the results of basic experiments with the developed optical setup are carried out to verify the possibility of fabricating the two-axis fine diffraction grating with a single exposure by the developed interferometer unit.

AB - A non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of a two-axis diffraction grating designed in a compact size is developed. A design study of the modified optical setup for the interferometer and the results of basic experiments with the developed optical setup are carried out to verify the possibility of fabricating the two-axis fine diffraction grating with a single exposure by the developed interferometer unit.

KW - Laser interference lithography

KW - Lloyd's mirror interferometer

KW - Photo resist

UR - http://www.scopus.com/inward/record.url?scp=85062237845&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85062237845&partnerID=8YFLogxK

U2 - 10.1109/AMCON.2018.8614804

DO - 10.1109/AMCON.2018.8614804

M3 - Conference contribution

AN - SCOPUS:85062237845

T3 - Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

SP - 28

EP - 29

BT - Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

A2 - Meen, Teen-Hang

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

Y2 - 16 November 2018 through 18 November 2018

ER -