@inproceedings{301c1ac96b16422780203d838111e8d6,
title = "A compact two-axis Lloyd's mirror interferometer for scale grating fabrication",
abstract = "A non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of a two-axis diffraction grating designed in a compact size is developed. A design study of the modified optical setup for the interferometer and the results of basic experiments with the developed optical setup are carried out to verify the possibility of fabricating the two-axis fine diffraction grating with a single exposure by the developed interferometer unit.",
keywords = "Laser interference lithography, Lloyd's mirror interferometer, Photo resist",
author = "Masanori Matsunaga and Kazuki Mano and Hiraku Matsukuma and Yuki Shimizu and Wei Gao",
note = "Funding Information: This work was supported by the Japan Society for the Promotion of Science (JSPS). Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 ; Conference date: 16-11-2018 Through 18-11-2018",
year = "2019",
month = jan,
day = "16",
doi = "10.1109/AMCON.2018.8614804",
language = "English",
series = "Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "28--29",
editor = "Teen-Hang Meen",
booktitle = "Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018",
}