A compact interferometer using moire effect for the phase compensation

S. Watanabe, K. Hane, T. Goto

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

A compact interferometer using a grating beamsplitter is reported. The phase of the interference signal was adjusted by using the moire effect of the gratings, so that a small optical path difference was compensated precisely by the magnified displacement of the grating. The optical system was analyzed theoretically on the basis of the Fourier optics. For the interferometric measurement in the microscopic region, a compact optical system was assembled from the microscopic objective and the 25-μm gratings. The characteristics of the proposed interferometer were investigated in the measurements of film thickness, piezoelectric vibration, and photoacoustic effect.

Original languageEnglish
Pages (from-to)3856-3861
Number of pages6
JournalReview of Scientific Instruments
Volume63
Issue number8
DOIs
Publication statusPublished - 1992
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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