A bellows-shape electrostatic microactuator

K. Minami, H. Morishita, M. Esashi

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Abstract

The bellows-shape electrostatic microactuator was developed by using a novel fabrication technique which combines excimer laser ablation and polymer/metal film deposition. The actuator consists of ∼2.5 μm thick parylene (poly-para-xylelene) polymer bellows and gold electrodes. The actuator is 1.2 mm in diameter and the bellows part is a hollow screw thread the pitch of which is 23 μm. Parylene and gold electrode are evaporated on the screw-shape polyimide core mold made by excimer laser ablation. At the end of the fabrication, the core mold is removed by wet etching. The actuator is driven by DC voltage and the displacement is 30 μm (3.4% of the length of the actuator) and the actuation speed exceeded 20 μm/ms when applied 100 V.

Original languageEnglish
Pages (from-to)269-276
Number of pages8
JournalSensors and Actuators, A: Physical
Volume72
Issue number3
DOIs
Publication statusPublished - 1999 Feb 16

Keywords

  • Bellows-shape
  • Electrostatic microactuator
  • Excimer laser ablation
  • Parylene

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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