A bakable microvalve with a Kovar-glass-silicon-glass structure

Dong Youn Sim, Toru Kurabayashi, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Abstract

A new bakable pneumatic silicon microvalve has been developed by micromachining for advanced semiconductor device fabrication. This microvalve is composed of an anodically bonded glass-silicon-glass structure and it is further bonded to a Kovar alloy block which has stainless steel tubes. The gas flow rate could be controlled from 0.5 sccm to 50 sccm at an inlet pressure of 0.26 kgf cm-2. This microvalve can be used in the temperature range from 25 to 120°C.

Original languageEnglish
Pages (from-to)266-271
Number of pages6
JournalJournal of Micromechanics and Microengineering
Volume6
Issue number2
DOIs
Publication statusPublished - 1996 Jun 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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