A 60×60μm2 size planar shielded loop probe for low lift-off on-chip magnetic near field measurements

Masahiro Yamaguchi, Sho Muroga, Shiori Nanba, Kaoru Arai, Kunio Yanagi, Yasushi Endo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A new Si on-chip planar shielded loop coil with 60 × 60 μm 2 window size has been developed for high special resolution magnetic near field measurements. The coil is located closely to the Si chip edge to lower the lift-off between the coil and a device-under-test (DUT) down to 10μm. The Si chip with the coil is mounted on a small PCB substrate to complete a magnetic near field probe. Then the probe is set on a newly developed 3-D scanner, consisting of an in-plane stage to move around the DUT with positioning accuracy of 10 μm, and a vertical stage to hold the probe with yaw, pitch, and roll angles adjustor. The developed probe scanner is applied for scanning magnetic near field on an LTE (Log Term Evolution)-class CMOS RFIC receiver test element group (TEG) chip we separately developed. It is demonstrated that the radiated emission from the TEG chip is suppressed by more than 15 dB by using a 1-μm-thick Co85Zr3Nb12 soft magnetic film integrated on the passivation of the TEG chip.

Original languageEnglish
Title of host publicationProceedings of the 2013 International Symposium on Electromagnetic Compatibility, EMC Europe 2013
Pages977-980
Number of pages4
Publication statusPublished - 2013 Dec 24
Event2013 International Symposium on Electromagnetic Compatibility, EMC Europe 2013 - Brugge, Belgium
Duration: 2013 Sep 22013 Sep 6

Other

Other2013 International Symposium on Electromagnetic Compatibility, EMC Europe 2013
CountryBelgium
CityBrugge
Period13/9/213/9/6

Keywords

  • LTE
  • Magnetic near field measurement
  • Planar shielded loop coil
  • Radio frequency integrated circuit

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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  • Cite this

    Yamaguchi, M., Muroga, S., Nanba, S., Arai, K., Yanagi, K., & Endo, Y. (2013). A 60×60μm2 size planar shielded loop probe for low lift-off on-chip magnetic near field measurements. In Proceedings of the 2013 International Symposium on Electromagnetic Compatibility, EMC Europe 2013 (pp. 977-980). [6653443]