TY - GEN
T1 - A 3-D MEMS optical switch for OXCs
AU - Yamamoto, T.
AU - Yamaguchi, J.
AU - Takeuchi, N.
AU - Shimizu, A.
AU - Higurashi, E.
AU - Sawada, R.
AU - Uenishi, Y.
N1 - Publisher Copyright:
© 2000 Optical Society of America
PY - 2003
Y1 - 2003
N2 - A large-scale, compact optical switch based on MEMS-tilt mirror arrays and free-space optics is described. The mirror fabricated by the SOI-bulk micromachining technology provides reliable switching, and the optics consists of low-cost, high-accurate polymer components. A prototype with 100-ch I/Os features a coupling loss of 4.0dB and switching time of 3ms.
AB - A large-scale, compact optical switch based on MEMS-tilt mirror arrays and free-space optics is described. The mirror fabricated by the SOI-bulk micromachining technology provides reliable switching, and the optics consists of low-cost, high-accurate polymer components. A prototype with 100-ch I/Os features a coupling loss of 4.0dB and switching time of 3ms.
UR - http://www.scopus.com/inward/record.url?scp=85134666281&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85134666281&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85134666281
T3 - Optics InfoBase Conference Papers
BT - Frontiers in Optics, FiO 2003
PB - Optica Publishing Group (formerly OSA)
T2 - Frontiers in Optics, FiO 2003
Y2 - 5 October 2003
ER -