A 128Mb floating body RAM(FBRAM) on SOI with multi-averaging scheme of dummy cell

Takashi Ohsawa, Tomoki Higashi, Katsuyuki Fujita, Kosuke Hatsuda, Nobuyuki Ikumi, Tomoaki Shino, Hiroomi Nakajima, Yoshihiro Minami, Naoki Kusunoki, Atsushi Sakamoto, Jun Nishimura, Takeshi Hamamoto, Shuso Fujii

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    9 Citations (Scopus)

    Abstract

    A 128Mbit FBRAM using the floating body cell(FBC) the size of 0.17μm2(6.24F2 with F-0.165μm) was successfully fabricated and a high bit yield(∼99.999%) was obtained.

    Original languageEnglish
    Title of host publication2006 Symposium on VLSI Circuits, VLSIC - Digest of Technical Papers
    Pages180-181
    Number of pages2
    Publication statusPublished - 2006 Dec 1
    Event2006 Symposium on VLSI Circuits, VLSIC - Honolulu, HI, United States
    Duration: 2006 Jun 152006 Jun 17

    Publication series

    NameIEEE Symposium on VLSI Circuits, Digest of Technical Papers

    Other

    Other2006 Symposium on VLSI Circuits, VLSIC
    CountryUnited States
    CityHonolulu, HI
    Period06/6/1506/6/17

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Electrical and Electronic Engineering

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