A 1024×1 linear photodiode array sensor with fast readout speed flexible pixel-level integration time and high stability to UV light exposure

Takahiro Akutsu, Shun Kawada, Yasumasa Koda, Taiki Nakazawa, Rihito Kuroda, Shigetoshi Sugawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

In this paper, we demonstrate two types of new photodiode array (PDA) with fast readout speed and high stability to ultraviolet (UV) light exposure. One is a high full well capacity sensor specialized for absorption spectroscopy, the other one is a high sensitivity sensor for emission spectroscopy. By introducing multiple readout paths along the long side of the rectangle PD, both two PDAs have achieved more than 150 times faster readout speed compared with a general PDA structure with a single readout path along the short side of PD. By introducing a photodiode (PD) structure with a thin and steep dopant profile p+ layer formed on a flattened Si surface, a higher stability of the light sensitivity to UV light exposure was confirmed compared with a general PD structure for conventional PDAs.

Original languageEnglish
Title of host publicationProceedings of SPIE-IS and T Electronic Imaging - Image Sensors and Imaging Systems 2014
PublisherSPIE
ISBN (Print)9780819499394
DOIs
Publication statusPublished - 2014 Jan 1
EventImage Sensors and Imaging Systems 2014 - San Francisco, CA, United States
Duration: 2014 Feb 52014 Feb 6

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9022
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherImage Sensors and Imaging Systems 2014
CountryUnited States
CitySan Francisco, CA
Period14/2/514/2/6

Keywords

  • Full well capacity
  • Linear sensor
  • Photodiode array
  • Readout speed
  • Sensitivity
  • UV light Stability

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Akutsu, T., Kawada, S., Koda, Y., Nakazawa, T., Kuroda, R., & Sugawa, S. (2014). A 1024×1 linear photodiode array sensor with fast readout speed flexible pixel-level integration time and high stability to UV light exposure. In Proceedings of SPIE-IS and T Electronic Imaging - Image Sensors and Imaging Systems 2014 [90220L] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9022). SPIE. https://doi.org/10.1117/12.2040764