A 0.2-μm 180-GHz-f max 6.7-ps-ECL SOI/HRS self-aligned SEG SiGe HBT/CMOS technology for microwave and high-speed digital applications

Katsuyoshi Washio, Eiji Ohue, Hiromi Shimamoto, Katsuya Oda, Reiko Hayami, Yukihiro Kiyota, Masamichi Tanabe, Masao Kondo, Takashi Hashimoto, Takashi Harada

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47 Citations (Scopus)

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