9.5 GHz Solidly Mounted Bulk Acoustic Wave Resonator using Third Overtone of Thickness Extension Mode in LiNbO3

Michio Kadota; Fuyuko Yamashita; Shuji Tanaka

doi:10.1109/IUS54386.2022.9957403

9.5 GHz Solidly Mounted Bulk Acoustic Wave Resonator using Third Overtone of Thickness Extension Mode in LiNbO₃

Michio Kadota, Fuyuko Yamashita, Shuji Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper reports a new method to preferentially excite the third overtone response for a solidly-mounted-BAW resonator (SM-BAWR). By FEM simulation, it was found that λ/20 layer thickness of a Bragg reflector was suitable for the excitation of the third overtone (λ is the wavelength of the fundamental mode in a piezoelectric layer). The SM-BAWR was fabricated using a 1 μm thick 36°Y LiNbO3 plate and 4 pairs of SiO2 and Ta as the Bragg reflector. A 9.5 GHz third overtone response was more strongly observed than the fundamental mode, and the impedance ratio was as high as 31 dB.

Original language	English
Title of host publication	IUS 2022 - IEEE International Ultrasonics Symposium
Publisher	IEEE Computer Society
ISBN (Electronic)	9781665466578
DOIs	https://doi.org/10.1109/IUS54386.2022.9957403
Publication status	Published - 2022
Event	2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy Duration: 2022 Oct 10 → 2022 Oct 13

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
Volume	2022-October
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Conference

Conference	2022 IEEE International Ultrasonics Symposium, IUS 2022
Country/Territory	Italy
City	Venice
Period	22/10/10 → 22/10/13

Keywords

Bragg reflector
LiNbO3
Solidly-mounted BAW resonator
third overtone

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/IUS54386.2022.9957403

Cite this

9.5 GHz Solidly Mounted Bulk Acoustic Wave Resonator using Third Overtone of Thickness Extension Mode in LiNbO₃. / Kadota, Michio; Yamashita, Fuyuko; Tanaka, Shuji.

IUS 2022 - IEEE International Ultrasonics Symposium. IEEE Computer Society, 2022. (IEEE International Ultrasonics Symposium, IUS; Vol. 2022-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kadota, M, Yamashita, F & Tanaka, S 2022, 9.5 GHz Solidly Mounted Bulk Acoustic Wave Resonator using Third Overtone of Thickness Extension Mode in LiNbO₃. in IUS 2022 - IEEE International Ultrasonics Symposium. IEEE International Ultrasonics Symposium, IUS, vol. 2022-October, IEEE Computer Society, 2022 IEEE International Ultrasonics Symposium, IUS 2022, Venice, Italy, 22/10/10. https://doi.org/10.1109/IUS54386.2022.9957403

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title = "9.5 GHz Solidly Mounted Bulk Acoustic Wave Resonator using Third Overtone of Thickness Extension Mode in LiNbO3",

abstract = "This paper reports a new method to preferentially excite the third overtone response for a solidly-mounted-BAW resonator (SM-BAWR). By FEM simulation, it was found that λ/20 layer thickness of a Bragg reflector was suitable for the excitation of the third overtone (λ is the wavelength of the fundamental mode in a piezoelectric layer). The SM-BAWR was fabricated using a 1 μm thick 36°Y LiNbO3 plate and 4 pairs of SiO2 and Ta as the Bragg reflector. A 9.5 GHz third overtone response was more strongly observed than the fundamental mode, and the impedance ratio was as high as 31 dB.",

keywords = "Bragg reflector, LiNbO3, Solidly-mounted BAW resonator, third overtone",

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AB - This paper reports a new method to preferentially excite the third overtone response for a solidly-mounted-BAW resonator (SM-BAWR). By FEM simulation, it was found that λ/20 layer thickness of a Bragg reflector was suitable for the excitation of the third overtone (λ is the wavelength of the fundamental mode in a piezoelectric layer). The SM-BAWR was fabricated using a 1 μm thick 36°Y LiNbO3 plate and 4 pairs of SiO2 and Ta as the Bragg reflector. A 9.5 GHz third overtone response was more strongly observed than the fundamental mode, and the impedance ratio was as high as 31 dB.

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