50μm gap 8×8 pixels deformable mirror fabricated by membrane transfer process

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. A 50μm air gap is generated a large between the mirror membrane and the electrode to get a large stroke. A DM with a 4mm×4mm mirror membrane and 8×8 underlying electrode array a is fabricated by combining Au-Si eutectic wafer bonding and the subsequent all-dry release process.

Original languageEnglish
Title of host publication2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PublisherIEEE Computer Society
Pages171-172
Number of pages2
ISBN (Electronic)9780992841423
DOIs
Publication statusPublished - 2014 Oct 14
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: 2014 Aug 172014 Aug 21

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period14/8/1714/8/21

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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