3D profile measurement of nanometer cutting edges of single-point diamond tools for ultra-precision machining

Y. Arai, T. Asai, S. Ferdous, W. Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper describes an atomic force microscope (AFM) based instrument for 3D edge profile measurement of single-point diamond cutting tools. The instrument is composed of an AFM unit and an optical sensor for alignment of the AFM probe tip (silicon cantilever) with the diamond cutting tool edge. In the optical sensor, a laser beam from a laser diode along the Y-axis is focused to generate a small beam spot with a micrometer-order diameter at the beam waist, and then received by a photo-detector (photodiode). The tool edge top and the AFM probe tip are brought to the center of the beam waist in the XZ-plane through monitoring the variation of the photodiode output, respectively. Consequently, the AFM tip can be aligned with the tool edge top. Alignment experiments and 3D edge profile measurements of a round-nose type single-point diamond tool are carried out.

Original languageEnglish
Title of host publication8th CHINA-JAPAN International Conference on Ultra-Precision Machining, CJICUPM2008
Pages138-142
Number of pages5
DOIs
Publication statusPublished - 2009
EventCHINA-JAPAN International Conference on Ultra-Precision Machining, CJICUPM2008 - Changsha, China
Duration: 2008 Nov 242008 Nov 25

Publication series

NameAdvanced Materials Research
Volume69-70
ISSN (Print)1022-6680

Other

OtherCHINA-JAPAN International Conference on Ultra-Precision Machining, CJICUPM2008
CountryChina
CityChangsha
Period08/11/2408/11/25

Keywords

  • AFM
  • Diamond cutting tool
  • Edge profile
  • Measurement

ASJC Scopus subject areas

  • Engineering(all)

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