3D impurity profiles of doped/intrinsic amorphous-silicon layers composing textured silicon heterojunction solar cells detected by atom probe tomography

Yasuo Shimizu, Bin Han, Naoki Ebisawa, Yoshinari Ichihashi, Taiki Hashiguchi, Hirotaka Katayama, Mitsuhiro Matsumoto, Akira Terakawa, Koji Inoue, Yasuyoshi Nagai

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Engineering & Materials Science

Physics & Astronomy